Abstract
Buckling of stiff thin films on compliant substrates represents a variety of applications, ranging from stretchable electronics to micro-nanometrology. Different but complementary to previously reported sinusoidal buckling waves, this letter presents a nonsinusoidal surface profile of buckled thin Au films on compliant substrates, specifically, a secondary dip on top of buckling wave or rather broadened wave top with very sharp trough. This nonsinusoidal profile is likely due to tension/compression asymmetry, i.e., different strengths in tension and compression resulted from the polycrystalline, grained microstructure of metal film. Finite element analysis with asymmetric tension/compression material model has reproduced the experiments well qualitatively.
Original language | English |
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Pages (from-to) | L9-L13 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 27 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2009 |
Bibliographical note
Funding Information:H. Jiang acknowledges the support from the National Science Foundation under Grant No. DMI-0328162. D.-Y. Khang acknowledges financial support from the Yonsei University Research Fund of 2008, and “System IC 2010” project of Korea Ministry of Commerce, Industry and Economy.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films