Novel Ni germanide technology with co-sputtering of Ni and Pt for thermally stable Ge MOSFETs on Ge-on-Si substrate

Min Ho Kang, Se Kyung Oh, Hong Sik Shin, Jung Ho Yoo, Ga Won Lee, Jin Suk Wang, Jung Woo Oh, Prashant Majhi, Raj Jammy, Hi Deok Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science