Novel recycling method for boron removal from silicon by thermal plasma treatment coupled with steam and hydrogen gases

Su Hyun Baek, Hyunjae Lee, Dong Joon Min, Su Ji Choi, Byung Moon Moon, Hyun Do Jung

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3 Citations (Scopus)


Boron (B) separation from photovoltaic silicon (Si) remains a research challenge in the recycling field. In this study, a novel B-removal process was developed using thermal plasma treatment coupled with steam and hydrogen gases. Experiments were performed on artificially B-doped Si using various plasma conditions of mixed argon (Ar)/steam/hydrogen gases and varied refining time. The B concentration in all of the samples decreased with increasing refining time. The use of the plasma mixed with Ar/steam/hydrogen gases resulted in a significant improvement of the efficiency of B removal compared with the Ar/steam plasma refining. In addition, with increasing steam content in the plasma with mixed Ar/steam/hydrogen gases, the B-removal rates increased.

Original languageEnglish
Article number401
Issue number10
Publication statusPublished - 2017 Oct


All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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