Numerical analysis of an annular-aperture solid immersion lens

Cheng Liu, Seung Han Park

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

A physical model of an annular-aperture solid immersion lens (SIL) is proposed, and its attractive features are presented numerically with the finite-difference time-domain method. Placing an appropriate annular aperture in front of the SIL shows that the focal depth can evidently be improved, combining the virtues of the annular-aperture technique and the SIL technique. With this proposed method the rigorous distance control condition in related devices can be relaxed, preventing scratches or collisions between the optical head and the recording medium. Potentially, this technique could have great prospects for applications in optical data recording, lithography, and other applications that depend on immersion media to meet the resolution criteria across the image field.

Original languageEnglish
Pages (from-to)1742-1744
Number of pages3
JournalOptics Letters
Volume29
Issue number15
DOIs
Publication statusPublished - 2004 Aug 1

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submerging
numerical analysis
apertures
lenses
data recording
finite difference time domain method
lithography
recording
collisions

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

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Numerical analysis of an annular-aperture solid immersion lens. / Liu, Cheng; Park, Seung Han.

In: Optics Letters, Vol. 29, No. 15, 01.08.2004, p. 1742-1744.

Research output: Contribution to journalArticle

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