Numerical simulations and experiments about contamination mechanism of solid immersion lens system concerning hole and geometries of lens holder

Moon Ho Choi, Tae Man Yang, Yoon Chul Rhim, Jeong Kyo Seo, In Ho Choi, Byung Hoon Min

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The air flow field around a conical type solid immersion lens (SIL) system is simulated numerically and confirmed with experiment using a micro-particle image velocimetry (PIV) system. Jt is found that the back-flow from the downstream of the SIL is a major candidate for the contamination of the SIL. Five modifications are proposed to suppress the particle conveying mechanism, the back-flow. Among these modifications a method using two flow-bypasses reduces the back-flow most effectively, which connects the top surface of the SIL system and two side-holes of the lens holder where the static pressure is the minimum.

Original languageEnglish
Pages (from-to)5800-5805
Number of pages6
JournalJapanese journal of applied physics
Volume47
Issue number7 PART 2
DOIs
Publication statusPublished - 2008 Jul 18

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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