Numerical simulations and experiments about contamination mechanism of solid immersion lens system concerning hole and geometries of lens holder

Moon Ho Choi, Tae Man Yang, Yoon Chul Rhim, Jeong Kyo Seo, In Ho Choi, Byung Hoon Min

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The air flow field around a conical type solid immersion lens (SIL) system is simulated numerically and confirmed with experiment using a micro-particle image velocimetry (PIV) system. Jt is found that the back-flow from the downstream of the SIL is a major candidate for the contamination of the SIL. Five modifications are proposed to suppress the particle conveying mechanism, the back-flow. Among these modifications a method using two flow-bypasses reduces the back-flow most effectively, which connects the top surface of the SIL system and two side-holes of the lens holder where the static pressure is the minimum.

Original languageEnglish
Pages (from-to)5800-5805
Number of pages6
JournalJapanese journal of applied physics
Volume47
Issue number7 PART 2
DOIs
Publication statusPublished - 2008 Jul 18

Fingerprint

holders
submerging
Lenses
contamination
Contamination
lenses
Geometry
Computer simulation
geometry
simulation
Experiments
static pressure
bypasses
Conveying
air flow
particle image velocimetry
Velocity measurement
Flow fields
flow distribution
Air

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Choi, Moon Ho ; Yang, Tae Man ; Rhim, Yoon Chul ; Seo, Jeong Kyo ; Choi, In Ho ; Min, Byung Hoon. / Numerical simulations and experiments about contamination mechanism of solid immersion lens system concerning hole and geometries of lens holder. In: Japanese journal of applied physics. 2008 ; Vol. 47, No. 7 PART 2. pp. 5800-5805.
@article{3b592f0966e44a868b2229d394cb8519,
title = "Numerical simulations and experiments about contamination mechanism of solid immersion lens system concerning hole and geometries of lens holder",
abstract = "The air flow field around a conical type solid immersion lens (SIL) system is simulated numerically and confirmed with experiment using a micro-particle image velocimetry (PIV) system. Jt is found that the back-flow from the downstream of the SIL is a major candidate for the contamination of the SIL. Five modifications are proposed to suppress the particle conveying mechanism, the back-flow. Among these modifications a method using two flow-bypasses reduces the back-flow most effectively, which connects the top surface of the SIL system and two side-holes of the lens holder where the static pressure is the minimum.",
author = "Choi, {Moon Ho} and Yang, {Tae Man} and Rhim, {Yoon Chul} and Seo, {Jeong Kyo} and Choi, {In Ho} and Min, {Byung Hoon}",
year = "2008",
month = "7",
day = "18",
doi = "10.1143/JJAP.47.5800",
language = "English",
volume = "47",
pages = "5800--5805",
journal = "Japanese Journal of Applied Physics",
issn = "0021-4922",
number = "7 PART 2",

}

Numerical simulations and experiments about contamination mechanism of solid immersion lens system concerning hole and geometries of lens holder. / Choi, Moon Ho; Yang, Tae Man; Rhim, Yoon Chul; Seo, Jeong Kyo; Choi, In Ho; Min, Byung Hoon.

In: Japanese journal of applied physics, Vol. 47, No. 7 PART 2, 18.07.2008, p. 5800-5805.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Numerical simulations and experiments about contamination mechanism of solid immersion lens system concerning hole and geometries of lens holder

AU - Choi, Moon Ho

AU - Yang, Tae Man

AU - Rhim, Yoon Chul

AU - Seo, Jeong Kyo

AU - Choi, In Ho

AU - Min, Byung Hoon

PY - 2008/7/18

Y1 - 2008/7/18

N2 - The air flow field around a conical type solid immersion lens (SIL) system is simulated numerically and confirmed with experiment using a micro-particle image velocimetry (PIV) system. Jt is found that the back-flow from the downstream of the SIL is a major candidate for the contamination of the SIL. Five modifications are proposed to suppress the particle conveying mechanism, the back-flow. Among these modifications a method using two flow-bypasses reduces the back-flow most effectively, which connects the top surface of the SIL system and two side-holes of the lens holder where the static pressure is the minimum.

AB - The air flow field around a conical type solid immersion lens (SIL) system is simulated numerically and confirmed with experiment using a micro-particle image velocimetry (PIV) system. Jt is found that the back-flow from the downstream of the SIL is a major candidate for the contamination of the SIL. Five modifications are proposed to suppress the particle conveying mechanism, the back-flow. Among these modifications a method using two flow-bypasses reduces the back-flow most effectively, which connects the top surface of the SIL system and two side-holes of the lens holder where the static pressure is the minimum.

UR - http://www.scopus.com/inward/record.url?scp=55249107828&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=55249107828&partnerID=8YFLogxK

U2 - 10.1143/JJAP.47.5800

DO - 10.1143/JJAP.47.5800

M3 - Article

AN - SCOPUS:55249107828

VL - 47

SP - 5800

EP - 5805

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

SN - 0021-4922

IS - 7 PART 2

ER -