Numerical simulations on a stepped solid immersion lens suggested from the experimental consideration of the backflow

Moon Ho Choi, Seung Hyun Han, Yoon Chul Rhim, Jeong Kyo Seo, In Ho Choi, Byung Hoon Min

Research output: Contribution to journalArticle

Abstract

When the air flows round the conical solid immersion lens (SIL) due to the disk rotation, the air climbs up along the lateral surface of the conical SIL at the downstream of the SIL. The existence of this backflow, which has opposite direction of the disk rotation, is confirmed numerically and experimentally. The backflow exists below one-quarter of the gap between the rotating disk and the lateral surface of the SIL and it is known to be one of major sources which carries contaminant particles to the SIL top. A step, 40 μm in height and 25 μm below the rotating disk, is fabricated on the lateral surface of the SIL to prevent the backflow. Numerical simulation shows the step reduces the pressure difference between the bottom and the top of the SIL so that the backflow is reduced dramatically.

Original languageEnglish
Article number03A049
JournalJapanese journal of applied physics
Volume48
Issue number3 PART 2
DOIs
Publication statusPublished - 2009 Mar

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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