Observation of the Initial Stage of 3C-SiC Heteroepitaxial Growth on the Si Nanomembrane

Kangsik Kim, Seungwoo Son, Seonwoo Lee, Jong Hyun Ahn, Zonghoon Lee

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2 Citations (Scopus)


One considerable concern in 3C-SiC growth is the different lattice constant between the 3C-SiC and Si substrate, which causes defects and strain at the interface. Although the heteroepitaxial growth has been achieved, there have been no experimental studies on the initial process of 3C-SiC growth. In this research, we directly observe heteroepitaxial growth of 3C-SiC on the (001) Si nanomembrane (Si NM) step by step. We used in situ heating transmission electron microscopy (TEM) to study the initial growth process of 3C-SiC growth at the nanoscale in a high-vacuum environment. We demonstrate the growth of 3C-SiC at the preferential (110) direction without defects. The heteroepitaxial grown 3C-SiC without defects is attributed to the bowing effect at the nanoscale to compensate for the lattice misfit. Based on these results, we proposed a new method to heteroepitaxially grow on the Si NM through in situ heating TEM study.

Original languageEnglish
Pages (from-to)1421-1426
Number of pages6
JournalCrystal Growth and Design
Issue number2
Publication statusPublished - 2022 Feb 2

Bibliographical note

Funding Information:
This work is based on the Ph.D. thesis of the first author at the Ulsan National Institute of Science and Technology (UNIST). This work was supported by IBS-R019-D1 and the National Research Foundation of Korea (NRF) grant funded by the Korea Government (MSIT) (no. 2018R1A2A2A05019598 and NRF-2015R1A3A2066337).

Publisher Copyright:
© 2022 American Chemical Society. All rights reserved.

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics


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