On-line monitoring of parylene film deposition with quartz crystal microbalance (QCM)

Ga Yeon Lee, Hyuk Ko, Ha Wook Jung, Suk Jin Ye, Moo Hwan Kim, Jae Chul Pyun

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

The parylene is a polymer of p-xylene and it is polymerized by pyrolysis of the parylene dimer called di-p-xylene. Until now the thickness of parylene has been controlled by adjusting the amount of the parylene dimer. However, the parylene film is required of more accurate and reproducible control method. This work presents the quartz crystal microbalance (QCM) for the on-line monitoring of parylene thickness. QCM was installed at the deposition chamber and the QCM signal monitoring was carried out during the whole deposition process. The QCM sensorgrams were recorded and the resonance frequency shift by the deposition of parylene on the QCM was correlated to the thickness of parylene film from the AFM. From the linear correlation parameters between the resonance frequency shift analysis and the film thickness, the QCM monitoring was determined to be feasible for the monitoring of parylene film thickness during the parylene deposition process.

Original languageEnglish
Pages (from-to)321-324
Number of pages4
JournalProcedia Engineering
Volume25
DOIs
Publication statusPublished - 2011 Dec 1
Event25th Eurosensors Conference - Athens, Greece
Duration: 2011 Sep 42011 Sep 7

Fingerprint

Quartz crystal microbalances
Monitoring
Xylene
Dimers
Film thickness
Pyrolysis
Polymers

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Lee, Ga Yeon ; Ko, Hyuk ; Jung, Ha Wook ; Ye, Suk Jin ; Kim, Moo Hwan ; Pyun, Jae Chul. / On-line monitoring of parylene film deposition with quartz crystal microbalance (QCM). In: Procedia Engineering. 2011 ; Vol. 25. pp. 321-324.
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abstract = "The parylene is a polymer of p-xylene and it is polymerized by pyrolysis of the parylene dimer called di-p-xylene. Until now the thickness of parylene has been controlled by adjusting the amount of the parylene dimer. However, the parylene film is required of more accurate and reproducible control method. This work presents the quartz crystal microbalance (QCM) for the on-line monitoring of parylene thickness. QCM was installed at the deposition chamber and the QCM signal monitoring was carried out during the whole deposition process. The QCM sensorgrams were recorded and the resonance frequency shift by the deposition of parylene on the QCM was correlated to the thickness of parylene film from the AFM. From the linear correlation parameters between the resonance frequency shift analysis and the film thickness, the QCM monitoring was determined to be feasible for the monitoring of parylene film thickness during the parylene deposition process.",
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On-line monitoring of parylene film deposition with quartz crystal microbalance (QCM). / Lee, Ga Yeon; Ko, Hyuk; Jung, Ha Wook; Ye, Suk Jin; Kim, Moo Hwan; Pyun, Jae Chul.

In: Procedia Engineering, Vol. 25, 01.12.2011, p. 321-324.

Research output: Contribution to journalConference article

TY - JOUR

T1 - On-line monitoring of parylene film deposition with quartz crystal microbalance (QCM)

AU - Lee, Ga Yeon

AU - Ko, Hyuk

AU - Jung, Ha Wook

AU - Ye, Suk Jin

AU - Kim, Moo Hwan

AU - Pyun, Jae Chul

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AB - The parylene is a polymer of p-xylene and it is polymerized by pyrolysis of the parylene dimer called di-p-xylene. Until now the thickness of parylene has been controlled by adjusting the amount of the parylene dimer. However, the parylene film is required of more accurate and reproducible control method. This work presents the quartz crystal microbalance (QCM) for the on-line monitoring of parylene thickness. QCM was installed at the deposition chamber and the QCM signal monitoring was carried out during the whole deposition process. The QCM sensorgrams were recorded and the resonance frequency shift by the deposition of parylene on the QCM was correlated to the thickness of parylene film from the AFM. From the linear correlation parameters between the resonance frequency shift analysis and the film thickness, the QCM monitoring was determined to be feasible for the monitoring of parylene film thickness during the parylene deposition process.

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