Optical detection of concentrations for mixed acid: HF and HNO3

Gumin Kang, Kyoungsik Kim

Research output: Contribution to journalConference article

Abstract

Mixed acid, which consist of HF and HNO3, is used as a good etchant for silicon dioxide in the wet etching and pickling process of stainless steel. The optical detection of concentration for such mixed acids is crucial to optimize and cut costs in the manufacturing process. Optical detection in the IR regime has been utilized to measure the concentration of the mixed acid for HF and HNO3, because that has several strong sorption peaks, which is contributed by vibrational mode of each acid molecular in this spectrum. In this research, we observed the concentrations of mixed acid to consist of HF and HNO3, as we measured the absorption intensity of OH- stretch and NO3- stretch band by optical spectroscopy. The concentration range of HF over 1.5-3 wt% and that of HNO3 over 2-10 wt% were studied in room temperature.

Original languageEnglish
Article number71832A
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume7183
DOIs
Publication statusPublished - 2009 Jun 1
EventMultiphoton Microscopy in the Biomedical Sciences IX - San Jose, CA, United States
Duration: 2009 Jan 252009 Jan 27

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

Cite this