We present a simple and stable optical performance evaluation and aligning method for a solid immersion lens (SIL) assembly with a wedge plate lateral shearing interferometer (LSI). There are many advantages in the use of the wedge plate LSI compared with a current SIL measurement method using a Twyman-Green interferometer. We designed the thicknesses, wedge angles, materials, and reflectances of the first and second surfaces of the wedge plate to be 1 mm, 0.02°, fused silica and 21, and 30%, respectively. Simulation and experimental results are well matched in quantitative analyses at shear ratios of 10, 40, and 70%. On the basis of simulation results for an aberrated SIL assembly with many misaligned cases, we suggested the use of the aligning process with the wedge plate LSI.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)