Abstract
We present a simple and stable optical performance evaluation and aligning method for a solid immersion lens (SIL) assembly with a wedge plate lateral shearing interferometer (LSI). There are many advantages in the use of the wedge plate LSI compared with a current SIL measurement method using a Twyman-Green interferometer. We designed the thicknesses, wedge angles, materials, and reflectances of the first and second surfaces of the wedge plate to be 1 mm, 0.02°, fused silica and 21, and 30%, respectively. Simulation and experimental results are well matched in quantitative analyses at shear ratios of 10, 40, and 70%. On the basis of simulation results for an aberrated SIL assembly with many misaligned cases, we suggested the use of the aligning process with the wedge plate LSI.
| Original language | English |
|---|---|
| Pages (from-to) | 5494-5498 |
| Number of pages | 5 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 46 |
| Issue number | 8 B |
| DOIs | |
| Publication status | Published - 2007 Aug 23 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)
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Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer. / Lee, Jin Eui; Kim, Wan Chin; Kim, Tae Seob; Choi, Hyun; Yoon, Yong Joong; Park, No Cheol; Park, Young Pil.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 46, No. 8 B, 23.08.2007, p. 5494-5498.Research output: Contribution to journal › Article
TY - JOUR
T1 - Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer
AU - Lee, Jin Eui
AU - Kim, Wan Chin
AU - Kim, Tae Seob
AU - Choi, Hyun
AU - Yoon, Yong Joong
AU - Park, No Cheol
AU - Park, Young Pil
PY - 2007/8/23
Y1 - 2007/8/23
N2 - We present a simple and stable optical performance evaluation and aligning method for a solid immersion lens (SIL) assembly with a wedge plate lateral shearing interferometer (LSI). There are many advantages in the use of the wedge plate LSI compared with a current SIL measurement method using a Twyman-Green interferometer. We designed the thicknesses, wedge angles, materials, and reflectances of the first and second surfaces of the wedge plate to be 1 mm, 0.02°, fused silica and 21, and 30%, respectively. Simulation and experimental results are well matched in quantitative analyses at shear ratios of 10, 40, and 70%. On the basis of simulation results for an aberrated SIL assembly with many misaligned cases, we suggested the use of the aligning process with the wedge plate LSI.
AB - We present a simple and stable optical performance evaluation and aligning method for a solid immersion lens (SIL) assembly with a wedge plate lateral shearing interferometer (LSI). There are many advantages in the use of the wedge plate LSI compared with a current SIL measurement method using a Twyman-Green interferometer. We designed the thicknesses, wedge angles, materials, and reflectances of the first and second surfaces of the wedge plate to be 1 mm, 0.02°, fused silica and 21, and 30%, respectively. Simulation and experimental results are well matched in quantitative analyses at shear ratios of 10, 40, and 70%. On the basis of simulation results for an aberrated SIL assembly with many misaligned cases, we suggested the use of the aligning process with the wedge plate LSI.
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U2 - 10.1143/JJAP.46.5494
DO - 10.1143/JJAP.46.5494
M3 - Article
AN - SCOPUS:34548247222
VL - 46
SP - 5494
EP - 5498
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 8 B
ER -