Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer

Jin Eui Lee; Wan Chin Kim; Tae Seob Kim; Hyun Choi; Yong Joong Yoon; No Cheol Park; Young Pil Park

doi:10.1143/JJAP.46.5494

Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer

Jin Eui Lee, Wan Chin Kim, Tae Seob Kim, Hyun Choi, Yong Joong Yoon, No Cheol Park, Young Pil Park

Department of Mechanical Engineering

Research output: Contribution to journal › Article

1 Citation (Scopus)

Abstract

We present a simple and stable optical performance evaluation and aligning method for a solid immersion lens (SIL) assembly with a wedge plate lateral shearing interferometer (LSI). There are many advantages in the use of the wedge plate LSI compared with a current SIL measurement method using a Twyman-Green interferometer. We designed the thicknesses, wedge angles, materials, and reflectances of the first and second surfaces of the wedge plate to be 1 mm, 0.02°, fused silica and 21, and 30%, respectively. Simulation and experimental results are well matched in quantitative analyses at shear ratios of 10, 40, and 70%. On the basis of simulation results for an aberrated SIL assembly with many misaligned cases, we suggested the use of the aligning process with the wedge plate LSI.

Original language	English
Pages (from-to)	5494-5498
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	46
Issue number	8 B
DOIs	https://doi.org/10.1143/JJAP.46.5494
Publication status	Published - 2007 Aug 23

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.46.5494

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Lee, J. E., Kim, W. C., Kim, T. S., Choi, H., Yoon, Y. J., Park, N. C., & Park, Y. P. (2007). Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 46(8 B), 5494-5498. https://doi.org/10.1143/JJAP.46.5494

Lee, Jin Eui ; Kim, Wan Chin ; Kim, Tae Seob ; Choi, Hyun ; Yoon, Yong Joong ; Park, No Cheol ; Park, Young Pil. / Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2007 ; Vol. 46, No. 8 B. pp. 5494-5498.

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abstract = "We present a simple and stable optical performance evaluation and aligning method for a solid immersion lens (SIL) assembly with a wedge plate lateral shearing interferometer (LSI). There are many advantages in the use of the wedge plate LSI compared with a current SIL measurement method using a Twyman-Green interferometer. We designed the thicknesses, wedge angles, materials, and reflectances of the first and second surfaces of the wedge plate to be 1 mm, 0.02°, fused silica and 21, and 30%, respectively. Simulation and experimental results are well matched in quantitative analyses at shear ratios of 10, 40, and 70%. On the basis of simulation results for an aberrated SIL assembly with many misaligned cases, we suggested the use of the aligning process with the wedge plate LSI.",

author = "Lee, {Jin Eui} and Kim, {Wan Chin} and Kim, {Tae Seob} and Hyun Choi and Yoon, {Yong Joong} and Park, {No Cheol} and Park, {Young Pil}",

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Lee, JE, Kim, WC, Kim, TS, Choi, H, Yoon, YJ, Park, NC & Park, YP 2007, 'Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 46, no. 8 B, pp. 5494-5498. https://doi.org/10.1143/JJAP.46.5494

Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer. / Lee, Jin Eui; Kim, Wan Chin; Kim, Tae Seob; Choi, Hyun; Yoon, Yong Joong; Park, No Cheol; Park, Young Pil.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 46, No. 8 B, 23.08.2007, p. 5494-5498.

Research output: Contribution to journal › Article

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