Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer

Jin Eui Lee, Wan Chin Kim, Tae Seob Kim, Hyun Choi, Yong Joong Yoon, No Cheol Park, Young Pil Park

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We present a simple and stable optical performance evaluation and aligning method for a solid immersion lens (SIL) assembly with a wedge plate lateral shearing interferometer (LSI). There are many advantages in the use of the wedge plate LSI compared with a current SIL measurement method using a Twyman-Green interferometer. We designed the thicknesses, wedge angles, materials, and reflectances of the first and second surfaces of the wedge plate to be 1 mm, 0.02°, fused silica and 21, and 30%, respectively. Simulation and experimental results are well matched in quantitative analyses at shear ratios of 10, 40, and 70%. On the basis of simulation results for an aberrated SIL assembly with many misaligned cases, we suggested the use of the aligning process with the wedge plate LSI.

Original languageEnglish
Pages (from-to)5494-5498
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number8 B
DOIs
Publication statusPublished - 2007 Aug 23

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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