Optimal design and fabrication of a rotary microactuator

S. Jung, J. J. Choi, C. Lee, Jongchul Park, C. Park, D. Min, C. Kim, J. U. Jeon

Research output: Contribution to conferencePaper

Abstract

The electrostatic rotary microactuators integrating optimally curved electrodes are proposed to enhance the actuating force-generation capability. In most of conventional type of electrostatic microactiators using rotary mode, the electrodes have not been rigorously evaluated in terms of optimality for the shape and simply have adopted a straight shape. As a result, two neighboring electrodes should be spaced in the way of leading to relative large clearance at the far region from the center of rotation, hence the force generation capability is inherently limited. To overcome the limitation, the optimally curved electrode shape is introduced by tilting the electrodes in a continuous manner along with the radius.

Original languageEnglish
Pages2097-2101
Number of pages5
Publication statusPublished - 2001 Jan 1
Event2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001) - Pusan, Korea, Republic of
Duration: 2001 Jun 122001 Jun 16

Other

Other2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001)
CountryKorea, Republic of
CityPusan
Period01/6/1201/6/16

Fingerprint

Microactuators
Fabrication
Electrodes
Electrostatics
Optimal design

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Jung, S., Choi, J. J., Lee, C., Park, J., Park, C., Min, D., ... Jeon, J. U. (2001). Optimal design and fabrication of a rotary microactuator. 2097-2101. Paper presented at 2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001), Pusan, Korea, Republic of.
Jung, S. ; Choi, J. J. ; Lee, C. ; Park, Jongchul ; Park, C. ; Min, D. ; Kim, C. ; Jeon, J. U. / Optimal design and fabrication of a rotary microactuator. Paper presented at 2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001), Pusan, Korea, Republic of.5 p.
@conference{edacbe2d32a0483b905eab3989a96720,
title = "Optimal design and fabrication of a rotary microactuator",
abstract = "The electrostatic rotary microactuators integrating optimally curved electrodes are proposed to enhance the actuating force-generation capability. In most of conventional type of electrostatic microactiators using rotary mode, the electrodes have not been rigorously evaluated in terms of optimality for the shape and simply have adopted a straight shape. As a result, two neighboring electrodes should be spaced in the way of leading to relative large clearance at the far region from the center of rotation, hence the force generation capability is inherently limited. To overcome the limitation, the optimally curved electrode shape is introduced by tilting the electrodes in a continuous manner along with the radius.",
author = "S. Jung and Choi, {J. J.} and C. Lee and Jongchul Park and C. Park and D. Min and C. Kim and Jeon, {J. U.}",
year = "2001",
month = "1",
day = "1",
language = "English",
pages = "2097--2101",
note = "2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001) ; Conference date: 12-06-2001 Through 16-06-2001",

}

Jung, S, Choi, JJ, Lee, C, Park, J, Park, C, Min, D, Kim, C & Jeon, JU 2001, 'Optimal design and fabrication of a rotary microactuator' Paper presented at 2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001), Pusan, Korea, Republic of, 01/6/12 - 01/6/16, pp. 2097-2101.

Optimal design and fabrication of a rotary microactuator. / Jung, S.; Choi, J. J.; Lee, C.; Park, Jongchul; Park, C.; Min, D.; Kim, C.; Jeon, J. U.

2001. 2097-2101 Paper presented at 2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001), Pusan, Korea, Republic of.

Research output: Contribution to conferencePaper

TY - CONF

T1 - Optimal design and fabrication of a rotary microactuator

AU - Jung, S.

AU - Choi, J. J.

AU - Lee, C.

AU - Park, Jongchul

AU - Park, C.

AU - Min, D.

AU - Kim, C.

AU - Jeon, J. U.

PY - 2001/1/1

Y1 - 2001/1/1

N2 - The electrostatic rotary microactuators integrating optimally curved electrodes are proposed to enhance the actuating force-generation capability. In most of conventional type of electrostatic microactiators using rotary mode, the electrodes have not been rigorously evaluated in terms of optimality for the shape and simply have adopted a straight shape. As a result, two neighboring electrodes should be spaced in the way of leading to relative large clearance at the far region from the center of rotation, hence the force generation capability is inherently limited. To overcome the limitation, the optimally curved electrode shape is introduced by tilting the electrodes in a continuous manner along with the radius.

AB - The electrostatic rotary microactuators integrating optimally curved electrodes are proposed to enhance the actuating force-generation capability. In most of conventional type of electrostatic microactiators using rotary mode, the electrodes have not been rigorously evaluated in terms of optimality for the shape and simply have adopted a straight shape. As a result, two neighboring electrodes should be spaced in the way of leading to relative large clearance at the far region from the center of rotation, hence the force generation capability is inherently limited. To overcome the limitation, the optimally curved electrode shape is introduced by tilting the electrodes in a continuous manner along with the radius.

UR - http://www.scopus.com/inward/record.url?scp=0034844453&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034844453&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0034844453

SP - 2097

EP - 2101

ER -

Jung S, Choi JJ, Lee C, Park J, Park C, Min D et al. Optimal design and fabrication of a rotary microactuator. 2001. Paper presented at 2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001), Pusan, Korea, Republic of.