Optofluidic encapsulation and manipulation of silicon microchips using image processing based optofluidic maskless lithography and railed microfluidics

Su Eun Chung, Seung Ah Lee, Jiyun Kim, Sunghoon Kwon

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We demonstrate optofluidic encapsulation of silicon microchips using image processing based optofluidic maskless lithography and manipulation using railed microfluidics. Optofluidic maskless lithography is a dynamic photopolymerization technique of free-floating microstructures within a fluidic channel using spatial light modulator. Using optofluidic maskless lithography via computer-vision aided image processing, polymer encapsulants are fabricated for chip protection and guiding-fins for efficient chip conveying within a fluidic channel. Encapsulated silicon chips with guiding-fins are assembled using railed microfluidics, which is an efficient guiding and heterogeneous self-assembly system of microcomponents. With our technology, externally fabricated silicon microchips are encapsulated, fluidically guided and self-assembled potentially enabling low cost fluidic manipulation and assembly of integrated circuits.

Original languageEnglish
Pages (from-to)2845-2850
Number of pages6
JournalLab on a chip
Volume9
Issue number19
DOIs
Publication statusPublished - 2009 Jan 1

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Microfluidics
Fluidics
Silicon
Encapsulation
Lithography
Image processing
Photopolymerization
Conveying
Self assembly
Computer vision
Integrated circuits
Polymers
Technology
Light
Costs and Cost Analysis
Microstructure
Costs

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Biochemistry
  • Chemistry(all)
  • Biomedical Engineering

Cite this

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Optofluidic encapsulation and manipulation of silicon microchips using image processing based optofluidic maskless lithography and railed microfluidics. / Chung, Su Eun; Lee, Seung Ah; Kim, Jiyun; Kwon, Sunghoon.

In: Lab on a chip, Vol. 9, No. 19, 01.01.2009, p. 2845-2850.

Research output: Contribution to journalArticle

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