Optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p+-Si membrane

Dooyoung Hah, Euisik Yoon, Songcheol Hong

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

We report a new optomechanical pressure sensor using multimode interference (MMI) couplers with polymer waveguides and a thin p+-Si membrane. We have simulated device characteristics by the normal mode theory and the mode propagation method applied to deflection and strain of the membrane. The optical waveguide is made of a single-mode, rib type of NOA73/PMMA/SiO2 multi-layer system. The devices have been fabricated on the thin p+-Si membranes which are selectively etched using bulk micromachining. Device size is 0.4 mm (width)×13 mm (length) and the total thickness of the membrane is 7 μm. The device characteristics are measured using a He-Ne laser (λ = 632.8 nm) as a light source. High sensitivity of 8.2 ppm/Pa has been obtained in the range of 100 kPa.

Original languageEnglish
Pages (from-to)204-210
Number of pages7
JournalSensors and Actuators, A: Physical
Volume79
Issue number3
DOIs
Publication statusPublished - 2000 Feb 25

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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