Oxide TFT fabrication with various low temperature techniques

S. Hong, H. J. Kim, I. S. Lee, H. T. Kim, H. J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose various researches to lower processing temperature in oxide thin film transistors (TFTs): photocatalytic reactions of titanium dioxide (PRT) and rotating magnetic field (RMF) treatment. PRT utilizes hydroxyl radical-assisted decomposition. It can be generated by UV irradiation on titanium dioxide (TiO:) and water molecules in precursor solution. RMF uses magnetic interactions between metal and oxygen atoms. In addition, we suggest ethyl cyanoacrylate (ECA) based instant glue (IG) as a new material for passivation layers of oxide TFTs with low processing temperature.

Original languageEnglish
Title of host publicationECS Transactions
EditorsYue Kuo
PublisherElectrochemical Society Inc.
Pages95-104
Number of pages10
Edition11
ISBN (Electronic)9781607685395
DOIs
Publication statusPublished - 2018 Jan 1
EventSymposium on Thin Film Transistor Technologies 14, TFTT 2018 - AiMES 2018, ECS and SMEQ Joint International Meeting - Cancun, Mexico
Duration: 2018 Sep 302018 Oct 4

Publication series

NameECS Transactions
Number11
Volume86
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Conference

ConferenceSymposium on Thin Film Transistor Technologies 14, TFTT 2018 - AiMES 2018, ECS and SMEQ Joint International Meeting
CountryMexico
CityCancun
Period18/9/3018/10/4

Fingerprint

Thin film transistors
Titanium dioxide
Oxide films
Fabrication
Magnetic fields
Glues
Processing
Passivation
Temperature
Irradiation
Decomposition
Atoms
Molecules
Oxygen
Metals
Water

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Hong, S., Kim, H. J., Lee, I. S., Kim, H. T., & Kim, H. J. (2018). Oxide TFT fabrication with various low temperature techniques. In Y. Kuo (Ed.), ECS Transactions (11 ed., pp. 95-104). (ECS Transactions; Vol. 86, No. 11). Electrochemical Society Inc.. https://doi.org/10.1149/08611.0095ecst
Hong, S. ; Kim, H. J. ; Lee, I. S. ; Kim, H. T. ; Kim, H. J. / Oxide TFT fabrication with various low temperature techniques. ECS Transactions. editor / Yue Kuo. 11. ed. Electrochemical Society Inc., 2018. pp. 95-104 (ECS Transactions; 11).
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Hong, S, Kim, HJ, Lee, IS, Kim, HT & Kim, HJ 2018, Oxide TFT fabrication with various low temperature techniques. in Y Kuo (ed.), ECS Transactions. 11 edn, ECS Transactions, no. 11, vol. 86, Electrochemical Society Inc., pp. 95-104, Symposium on Thin Film Transistor Technologies 14, TFTT 2018 - AiMES 2018, ECS and SMEQ Joint International Meeting, Cancun, Mexico, 18/9/30. https://doi.org/10.1149/08611.0095ecst

Oxide TFT fabrication with various low temperature techniques. / Hong, S.; Kim, H. J.; Lee, I. S.; Kim, H. T.; Kim, H. J.

ECS Transactions. ed. / Yue Kuo. 11. ed. Electrochemical Society Inc., 2018. p. 95-104 (ECS Transactions; Vol. 86, No. 11).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Hong S, Kim HJ, Lee IS, Kim HT, Kim HJ. Oxide TFT fabrication with various low temperature techniques. In Kuo Y, editor, ECS Transactions. 11 ed. Electrochemical Society Inc. 2018. p. 95-104. (ECS Transactions; 11). https://doi.org/10.1149/08611.0095ecst