Oxygen effect on laser crystallization of sputtered a-Si film on plastic substrate

J. M. Kim, D. Y. Kim, J. S. Jung, J. Y. Kwon, K. B. Park, H. Lim, T. Noguchi

Research output: Contribution to conferencePaper

Abstract

We studied a-Si film deposited on plastic substrate by rf sputtering as a precursor material for laser crystallization. a-Si films were deposited at room temperature and crystallized using excimer laser irradiation. It was found that the a-Si film deposited by rf sputtering was delaminated even at low laser energy densities below the energy condition for distinct lateral grain growth. Oxygen contents were optimized for a-Si films deposited by Xe sputtering. The oxygen gas incorporation is thought to increase the surface roughness and to induce the Si film agglomeration phenomenon during laser crystallization. The incorporated oxygen atoms in poly-Si film limit the grain growth of Si film.

Original languageEnglish
Pages1153-1156
Number of pages4
Publication statusPublished - 2005 Dec 1
EventIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan
Duration: 2005 Dec 62005 Dec 9

Other

OtherIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005
CountryJapan
CityTakamatsu
Period05/12/605/12/9

Fingerprint

Crystallization
Plastics
Oxygen
Lasers
Substrates
Sputtering
Grain growth
Excimer lasers
Laser beam effects
Polysilicon
Agglomeration
Surface roughness
Atoms
Gases
Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Kim, J. M., Kim, D. Y., Jung, J. S., Kwon, J. Y., Park, K. B., Lim, H., & Noguchi, T. (2005). Oxygen effect on laser crystallization of sputtered a-Si film on plastic substrate. 1153-1156. Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan.
Kim, J. M. ; Kim, D. Y. ; Jung, J. S. ; Kwon, J. Y. ; Park, K. B. ; Lim, H. ; Noguchi, T. / Oxygen effect on laser crystallization of sputtered a-Si film on plastic substrate. Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan.4 p.
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abstract = "We studied a-Si film deposited on plastic substrate by rf sputtering as a precursor material for laser crystallization. a-Si films were deposited at room temperature and crystallized using excimer laser irradiation. It was found that the a-Si film deposited by rf sputtering was delaminated even at low laser energy densities below the energy condition for distinct lateral grain growth. Oxygen contents were optimized for a-Si films deposited by Xe sputtering. The oxygen gas incorporation is thought to increase the surface roughness and to induce the Si film agglomeration phenomenon during laser crystallization. The incorporated oxygen atoms in poly-Si film limit the grain growth of Si film.",
author = "Kim, {J. M.} and Kim, {D. Y.} and Jung, {J. S.} and Kwon, {J. Y.} and Park, {K. B.} and H. Lim and T. Noguchi",
year = "2005",
month = "12",
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Kim, JM, Kim, DY, Jung, JS, Kwon, JY, Park, KB, Lim, H & Noguchi, T 2005, 'Oxygen effect on laser crystallization of sputtered a-Si film on plastic substrate', Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan, 05/12/6 - 05/12/9 pp. 1153-1156.

Oxygen effect on laser crystallization of sputtered a-Si film on plastic substrate. / Kim, J. M.; Kim, D. Y.; Jung, J. S.; Kwon, J. Y.; Park, K. B.; Lim, H.; Noguchi, T.

2005. 1153-1156 Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan.

Research output: Contribution to conferencePaper

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T1 - Oxygen effect on laser crystallization of sputtered a-Si film on plastic substrate

AU - Kim, J. M.

AU - Kim, D. Y.

AU - Jung, J. S.

AU - Kwon, J. Y.

AU - Park, K. B.

AU - Lim, H.

AU - Noguchi, T.

PY - 2005/12/1

Y1 - 2005/12/1

N2 - We studied a-Si film deposited on plastic substrate by rf sputtering as a precursor material for laser crystallization. a-Si films were deposited at room temperature and crystallized using excimer laser irradiation. It was found that the a-Si film deposited by rf sputtering was delaminated even at low laser energy densities below the energy condition for distinct lateral grain growth. Oxygen contents were optimized for a-Si films deposited by Xe sputtering. The oxygen gas incorporation is thought to increase the surface roughness and to induce the Si film agglomeration phenomenon during laser crystallization. The incorporated oxygen atoms in poly-Si film limit the grain growth of Si film.

AB - We studied a-Si film deposited on plastic substrate by rf sputtering as a precursor material for laser crystallization. a-Si films were deposited at room temperature and crystallized using excimer laser irradiation. It was found that the a-Si film deposited by rf sputtering was delaminated even at low laser energy densities below the energy condition for distinct lateral grain growth. Oxygen contents were optimized for a-Si films deposited by Xe sputtering. The oxygen gas incorporation is thought to increase the surface roughness and to induce the Si film agglomeration phenomenon during laser crystallization. The incorporated oxygen atoms in poly-Si film limit the grain growth of Si film.

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Kim JM, Kim DY, Jung JS, Kwon JY, Park KB, Lim H et al. Oxygen effect on laser crystallization of sputtered a-Si film on plastic substrate. 2005. Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan.