Parallel Recording Array Head of Nano-Aperture Flat-Tip Probes for High-Density Near-Field Optical Data Storage

Young-Joo Kim, Kazuhiro Suzuki, Kenya Goto

Research output: Contribution to journalArticle

36 Citations (Scopus)

Abstract

Increasing the memory capacity and data transfer rate of optical data storage to match the market requirements is now a challenging task. To realize a more effective and simple memory system, a parallel near-field optical system has been proposed using vertical cavity surface emitting laser (VCSEL) microprobe array heads. The concept, structure and fabrication process of new flat-tip microprobe arrays have been discussed and realized by the preparation of a silicon probe array in this research. Flat-tip probes are advantageous for improving optical properties since they are prepared from materials of high refractive index and the array shows good structural design for the contact head system with good uniformity of the probe height. We have successfully prepared Si nano-aperture probe arrays with the aperture size of 150 to 500 nm using microfabrication techniques, including photolithography, wet chemical etching, and a newly developed aperture formation process which uses a SiO2 mask layer. The microstructural observation of Si fiat-tip probe-arrays is in good agreement with our design concepts and supports the strong possibility of their application to actual recording heads. We are now developing a monolithic nano-aperture VCSEL probe to complete our parallel near-field optical system with high memory capacity and fast transfer rates in the near future.

Original languageEnglish
Pages (from-to)1783-1789
Number of pages7
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume40
Issue number3 B
Publication statusPublished - 2001 Dec 1

Fingerprint

data storage
near fields
apertures
recording
probes
surface emitting lasers
recording heads
structural design
cavities
laser arrays
photolithography
masks
etching
refractivity
optical properties
requirements
preparation
fabrication
silicon

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

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Parallel Recording Array Head of Nano-Aperture Flat-Tip Probes for High-Density Near-Field Optical Data Storage. / Kim, Young-Joo; Suzuki, Kazuhiro; Goto, Kenya.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 40, No. 3 B, 01.12.2001, p. 1783-1789.

Research output: Contribution to journalArticle

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