Parametric modeling of edge effects for polishing tool influence functions

Dae Wook Kim, Won Hyun Park, Sug Whan Kim, James H. Burge

Research output: Contribution to journalArticle

55 Citations (Scopus)

Abstract

Computer controlled polishing requires accurate knowledge of the tool influence function (TIF) for the polishing tool (i.e. lap). While a linear Preston's model for material removal allows the TIF to be determined for most cases, nonlinear removal behavior as the tool runs over the edge of the part introduces a difficulty in modeling the edge TIF. We provide a new parametric model that fits 5 parameters to measured data to accurately predict the edge TIF for cases of a polishing tool that is either spinning or orbiting over the edge of the workpiece.

Original languageEnglish
Pages (from-to)5656-5665
Number of pages10
JournalOptics Express
Volume17
Issue number7
DOIs
Publication statusPublished - 2009 Mar 30

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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