TY - GEN
T1 - Patterned Co/Pd multilayer structure for high-density magnetic recording media
AU - Kim, Hyunsu
AU - Kim, Sungman
AU - Roh, Jong Wook
AU - Chun, Dong Won
AU - Jeung, Won Yong
AU - Lee, Wooyoung
PY - 2010
Y1 - 2010
N2 - For development of high-density magnetic recording media, superparamagnetism due to thermal instability has been a main problem in make the density limitations. One of the most promising methods to overcome superparamagnetism is the use of patterned media. Particularly, Co/Pd multi-layer has been one of the significant materials for high-density magnetic recording media. In this study, we fabricated the patterned Co/Pd multilayer structures using electron-beam lithography and a dry etching technique and investigated the magnetic properties of the patterned structures
AB - For development of high-density magnetic recording media, superparamagnetism due to thermal instability has been a main problem in make the density limitations. One of the most promising methods to overcome superparamagnetism is the use of patterned media. Particularly, Co/Pd multi-layer has been one of the significant materials for high-density magnetic recording media. In this study, we fabricated the patterned Co/Pd multilayer structures using electron-beam lithography and a dry etching technique and investigated the magnetic properties of the patterned structures
UR - http://www.scopus.com/inward/record.url?scp=77951663263&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77951663263&partnerID=8YFLogxK
U2 - 10.1109/INEC.2010.5424791
DO - 10.1109/INEC.2010.5424791
M3 - Conference contribution
AN - SCOPUS:77951663263
SN - 9781424435449
T3 - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
SP - 1465
EP - 1466
BT - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
T2 - 2010 3rd International Nanoelectronics Conference, INEC 2010
Y2 - 3 January 2010 through 8 January 2010
ER -