Patterning of polymer thin films

P. J. Yoo, K. Y. Suh, Y. S. Kim, D. Y. Khang, H. H. Lee

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Citations (Scopus)
Original languageEnglish
Title of host publicationNanolithography and Patterning Techniques in Microelectronics
PublisherElsevier Ltd
Pages155-183
Number of pages29
ISBN (Print)9781855739314
DOIs
Publication statusPublished - 2005 Sep

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Yoo, P. J., Suh, K. Y., Kim, Y. S., Khang, D. Y., & Lee, H. H. (2005). Patterning of polymer thin films. In Nanolithography and Patterning Techniques in Microelectronics (pp. 155-183). Elsevier Ltd. https://doi.org/10.1533/9781845690908.155