Patterning of polymer thin films

P. J. Yoo, K. Y. Suh, Y. S. Kim, Dahl-Young Khang, H. H. Lee

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Citations (Scopus)
Original languageEnglish
Title of host publicationNanolithography and Patterning Techniques in Microelectronics
PublisherElsevier Ltd
Pages155-183
Number of pages29
ISBN (Print)9781855739314
DOIs
Publication statusPublished - 2005 Jan 1

Fingerprint

Polymer films
Thin films

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Yoo, P. J., Suh, K. Y., Kim, Y. S., Khang, D-Y., & Lee, H. H. (2005). Patterning of polymer thin films. In Nanolithography and Patterning Techniques in Microelectronics (pp. 155-183). Elsevier Ltd. https://doi.org/10.1533/9781845690908.155
Yoo, P. J. ; Suh, K. Y. ; Kim, Y. S. ; Khang, Dahl-Young ; Lee, H. H. / Patterning of polymer thin films. Nanolithography and Patterning Techniques in Microelectronics. Elsevier Ltd, 2005. pp. 155-183
@inbook{8858da6f6f6e4e8f81fd3363aa5cce27,
title = "Patterning of polymer thin films",
author = "Yoo, {P. J.} and Suh, {K. Y.} and Kim, {Y. S.} and Dahl-Young Khang and Lee, {H. H.}",
year = "2005",
month = "1",
day = "1",
doi = "10.1533/9781845690908.155",
language = "English",
isbn = "9781855739314",
pages = "155--183",
booktitle = "Nanolithography and Patterning Techniques in Microelectronics",
publisher = "Elsevier Ltd",

}

Yoo, PJ, Suh, KY, Kim, YS, Khang, D-Y & Lee, HH 2005, Patterning of polymer thin films. in Nanolithography and Patterning Techniques in Microelectronics. Elsevier Ltd, pp. 155-183. https://doi.org/10.1533/9781845690908.155

Patterning of polymer thin films. / Yoo, P. J.; Suh, K. Y.; Kim, Y. S.; Khang, Dahl-Young; Lee, H. H.

Nanolithography and Patterning Techniques in Microelectronics. Elsevier Ltd, 2005. p. 155-183.

Research output: Chapter in Book/Report/Conference proceedingChapter

TY - CHAP

T1 - Patterning of polymer thin films

AU - Yoo, P. J.

AU - Suh, K. Y.

AU - Kim, Y. S.

AU - Khang, Dahl-Young

AU - Lee, H. H.

PY - 2005/1/1

Y1 - 2005/1/1

UR - http://www.scopus.com/inward/record.url?scp=84902613119&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84902613119&partnerID=8YFLogxK

U2 - 10.1533/9781845690908.155

DO - 10.1533/9781845690908.155

M3 - Chapter

AN - SCOPUS:84902613119

SN - 9781855739314

SP - 155

EP - 183

BT - Nanolithography and Patterning Techniques in Microelectronics

PB - Elsevier Ltd

ER -

Yoo PJ, Suh KY, Kim YS, Khang D-Y, Lee HH. Patterning of polymer thin films. In Nanolithography and Patterning Techniques in Microelectronics. Elsevier Ltd. 2005. p. 155-183 https://doi.org/10.1533/9781845690908.155