Pb(ZrxTi1-x)O3 Thin Film Fabricated on Heterogeneous Under-Layer of Pt and SiO2 in High Density Ferroelectric Random Access Memory (FeRAM) Capacitor

Ho Jung Sun, Eun Seok Choi, Soon Yong Kweon, Nam Kyeong Kim, Seung Jin Yeom, Jae Sung Roh, Hyun Chul Sohn

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