PCA-based network modeling using standardized X-ray diffraction data for the electrical characteristics of the HfO2 thin films grown by MOMBE

Young Don Ko, Pyung Moon, Chang Eun Kim, Moon Ho Ham, Jae Min Myoung, Ilgu Yun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2007 International Semiconductor Device Research Symposium, ISDRS
DOIs
Publication statusPublished - 2007
Event2007 International Semiconductor Device Research Symposium, ISDRS - College Park, MD, United States
Duration: 2007 Dec 122007 Dec 14

Publication series

Name2007 International Semiconductor Device Research Symposium, ISDRS

Other

Other2007 International Semiconductor Device Research Symposium, ISDRS
CountryUnited States
CityCollege Park, MD
Period07/12/1207/12/14

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this