Phase and microstructure of ALD-W films deposited using B2H 6 and WF6 and their effects on CVD-W growth

Soo Hyun Kim, Seung Jin Yeom, Nohjung Kwak, Hyunchul Sohn

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds