Phase-shift digital holography using multilayer ceramic capacitor actuators

Jinsang Lim, Hyun Choi, No Cheol Park

Research output: Contribution to journalArticlepeer-review


In this paper, a four-step phase-shift digital holography (DH) system using multilayer ceramic capacitors (MLCCs) as actuators is proposed. This system is capable of implementing DH with low costs and small-form factors. As a material for actuators, MLCCs are more economical and easier to construct than conventional piezoelectric transducers. By applying a voltage to a single MLCC and measuring the displacement and standard deviation based on the shape change observed on the top surface of the MLCC with laser Doppler velocimetry, the applicability of the MLCC in terms of suitable driving characteristics for use as an actuator in the DH system was confirmed. As the accurate phase step actuation required to employ the MLCC actuator for DH cannot be performed, a four-step hologram extraction method was employed using the intensity information of the hologram obtained by continuously driving the MLCC actuator. Consequently, the proposed MLCC actuator was applied to a typical Michelson interferometer setup to measure a 1.8 µm step sample, and the quantitative phase information was obtained with a standard deviation of less than 1.3 nm.

Original languageEnglish
Article number107080
JournalOptics and Lasers in Engineering
Publication statusPublished - 2022 Sept

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. NRF-2019R1G1A1009520 , NRF-2019R1A2C1004687 ).

Publisher Copyright:
© 2022

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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