Phosphorus Doping of Si Nanosheets by Spin-on Dopant Proximity

Jeen Moon Yang, Jaejun Lee, Tae Eon Park, Dongjea Seo, Jeong Min Park, Sangwon Park, Jukwan Na, Juyoung Kwon, Hyo Jung Lee, Jaehyun Ryu, Heon Jin Choi

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