Phosphorus implantation into in situ doped Ge-on-Si for high light-emitting efficiency

Jiwoong Baek, Bugeun Ki, Daeik Kim, Chulwon Lee, Donguk Nam, Yong Hoon Cho, Jungwoo Oh

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We investigated the optical, electrical, and structural properties of epitaxially grown Ge-on-Si substrates after phosphorous implantation. Ion implantation increases n-type doping in Ge for an on-chip light source. However, its effects on Ge should be carefully studied as implantation may increase the recombination sites, and possibly reduce light-emitting efficiency. We studied the light-emitting efficiency of implanted Ge using various material characterizations. We found that phosphorous implantation increased the doping concentration of in situ doped Ge-on-Si, which boosted the photoluminescence by 12-30%. It is therefore critical to optimize the post-annealing and implantation doses to increase light-emitting efficiency of Ge.

Original languageEnglish
Pages (from-to)2939-2946
Number of pages8
JournalOptical Materials Express
Volume6
Issue number9
DOIs
Publication statusPublished - 2016 Jan 1

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Ion implantation
Phosphorus
Doping (additives)
Dosimetry
Light sources
Structural properties
Photoluminescence
Electric properties
Optical properties
Annealing
Substrates

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

Baek, Jiwoong ; Ki, Bugeun ; Kim, Daeik ; Lee, Chulwon ; Nam, Donguk ; Cho, Yong Hoon ; Oh, Jungwoo. / Phosphorus implantation into in situ doped Ge-on-Si for high light-emitting efficiency. In: Optical Materials Express. 2016 ; Vol. 6, No. 9. pp. 2939-2946.
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Phosphorus implantation into in situ doped Ge-on-Si for high light-emitting efficiency. / Baek, Jiwoong; Ki, Bugeun; Kim, Daeik; Lee, Chulwon; Nam, Donguk; Cho, Yong Hoon; Oh, Jungwoo.

In: Optical Materials Express, Vol. 6, No. 9, 01.01.2016, p. 2939-2946.

Research output: Contribution to journalArticle

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AU - Baek, Jiwoong

AU - Ki, Bugeun

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AU - Cho, Yong Hoon

AU - Oh, Jungwoo

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