Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

Chang Soo Lee, Jungwon Kim, J. Y. Son, Wonyong Choi, Hyungjun Kim

Research output: Contribution to journalArticle

57 Citations (Scopus)

Abstract

We prepared photocatalytic TiO2 thin films which exhibited relatively high growth rate and low impurity on polymer substrate by plasma enhanced atomic layer deposition (PE-ALD) from Ti(NMe2)4 [tetrakis (dimethylamido) Ti, TDMAT] and O2 plasma to show the self-cleaning effect. The TiO2 thin films with anatase phase and bandgap energy about 3.3 eV were deposited at growth temperature of 250 °C and the photocatalytic effects were compared with commercial Activ glass. From contact angles measurement of water droplet and photo-induced degradation test of organic liquid, TiO2 thin films with anatase phases showed superhydrophilic phenomena and decomposed organic liquid after UV irradiation. The anatase TiO2 thin film on polymer substrate showed highest photocatalytic efficiency after 5 h UV irradiation. We attribute the highest photocatalytic efficiency of TiO2 thin film with anatase structure to the formation of suitable crystalline phase and large surface area.

Original languageEnglish
Pages (from-to)628-633
Number of pages6
JournalApplied Catalysis B: Environmental
Volume91
Issue number3-4
DOIs
Publication statusPublished - 2009 Sep 28

Fingerprint

Atomic layer deposition
anatase
coating
Polymers
polymer
Titanium dioxide
Plasmas
plasma
substrate
Thin films
Coatings
Substrates
irradiation
Irradiation
liquid
Liquid films
Growth temperature
Angle measurement
droplet
Contact angle

All Science Journal Classification (ASJC) codes

  • Catalysis
  • Environmental Science(all)
  • Process Chemistry and Technology

Cite this

@article{18a08bde1d314ac8bcff741c434bfd27,
title = "Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition",
abstract = "We prepared photocatalytic TiO2 thin films which exhibited relatively high growth rate and low impurity on polymer substrate by plasma enhanced atomic layer deposition (PE-ALD) from Ti(NMe2)4 [tetrakis (dimethylamido) Ti, TDMAT] and O2 plasma to show the self-cleaning effect. The TiO2 thin films with anatase phase and bandgap energy about 3.3 eV were deposited at growth temperature of 250 °C and the photocatalytic effects were compared with commercial Activ glass. From contact angles measurement of water droplet and photo-induced degradation test of organic liquid, TiO2 thin films with anatase phases showed superhydrophilic phenomena and decomposed organic liquid after UV irradiation. The anatase TiO2 thin film on polymer substrate showed highest photocatalytic efficiency after 5 h UV irradiation. We attribute the highest photocatalytic efficiency of TiO2 thin film with anatase structure to the formation of suitable crystalline phase and large surface area.",
author = "Lee, {Chang Soo} and Jungwon Kim and Son, {J. Y.} and Wonyong Choi and Hyungjun Kim",
year = "2009",
month = "9",
day = "28",
doi = "10.1016/j.apcatb.2009.06.037",
language = "English",
volume = "91",
pages = "628--633",
journal = "Applied Catalysis B: Environmental",
issn = "0926-3373",
publisher = "Elsevier",
number = "3-4",

}

Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition. / Lee, Chang Soo; Kim, Jungwon; Son, J. Y.; Choi, Wonyong; Kim, Hyungjun.

In: Applied Catalysis B: Environmental, Vol. 91, No. 3-4, 28.09.2009, p. 628-633.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

AU - Lee, Chang Soo

AU - Kim, Jungwon

AU - Son, J. Y.

AU - Choi, Wonyong

AU - Kim, Hyungjun

PY - 2009/9/28

Y1 - 2009/9/28

N2 - We prepared photocatalytic TiO2 thin films which exhibited relatively high growth rate and low impurity on polymer substrate by plasma enhanced atomic layer deposition (PE-ALD) from Ti(NMe2)4 [tetrakis (dimethylamido) Ti, TDMAT] and O2 plasma to show the self-cleaning effect. The TiO2 thin films with anatase phase and bandgap energy about 3.3 eV were deposited at growth temperature of 250 °C and the photocatalytic effects were compared with commercial Activ glass. From contact angles measurement of water droplet and photo-induced degradation test of organic liquid, TiO2 thin films with anatase phases showed superhydrophilic phenomena and decomposed organic liquid after UV irradiation. The anatase TiO2 thin film on polymer substrate showed highest photocatalytic efficiency after 5 h UV irradiation. We attribute the highest photocatalytic efficiency of TiO2 thin film with anatase structure to the formation of suitable crystalline phase and large surface area.

AB - We prepared photocatalytic TiO2 thin films which exhibited relatively high growth rate and low impurity on polymer substrate by plasma enhanced atomic layer deposition (PE-ALD) from Ti(NMe2)4 [tetrakis (dimethylamido) Ti, TDMAT] and O2 plasma to show the self-cleaning effect. The TiO2 thin films with anatase phase and bandgap energy about 3.3 eV were deposited at growth temperature of 250 °C and the photocatalytic effects were compared with commercial Activ glass. From contact angles measurement of water droplet and photo-induced degradation test of organic liquid, TiO2 thin films with anatase phases showed superhydrophilic phenomena and decomposed organic liquid after UV irradiation. The anatase TiO2 thin film on polymer substrate showed highest photocatalytic efficiency after 5 h UV irradiation. We attribute the highest photocatalytic efficiency of TiO2 thin film with anatase structure to the formation of suitable crystalline phase and large surface area.

UR - http://www.scopus.com/inward/record.url?scp=68749092796&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=68749092796&partnerID=8YFLogxK

U2 - 10.1016/j.apcatb.2009.06.037

DO - 10.1016/j.apcatb.2009.06.037

M3 - Article

AN - SCOPUS:68749092796

VL - 91

SP - 628

EP - 633

JO - Applied Catalysis B: Environmental

JF - Applied Catalysis B: Environmental

SN - 0926-3373

IS - 3-4

ER -