Photolithographic route to the fabrication of micro/nanowires of III-V semiconductors

Yugang Sun, Dahl Young Khang, Feng Hua, Keith Hurley, Ralph G. Nuzzo, John A. Rogers

Research output: Contribution to journalArticle

84 Citations (Scopus)

Abstract

Nano/microwires of semiconducting materials (e.g., GaAs and InP) with triangular cross-sections can be fabricated by "top-down" approaches that combine lithography of high-quality bulk wafers (using either traditional photolithography or phase-shift optical lithography) with anisotropic chemical etching. This method gives good control over the lateral dimensions, lengths, and morphologies of free-standing wires. The behaviors of many different resist layers and etching chemistries are presented. It is shown how wire arrays with highly ordered alignments can be transfer printed onto plastic substrates. This "top-down" approach provides a simple, effective, and versatile way of generating high-quality single-crystalline wires of various compound semiconductors. The resultant wires and wire arrays have potential applications in electronics, optics, optoelectronics, and sensing.

Original languageEnglish
Pages (from-to)30-40
Number of pages11
JournalAdvanced Functional Materials
Volume15
Issue number1
DOIs
Publication statusPublished - 2005 Jan 1

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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