Physical and electrical characteristics of physical vapor-deposited tungsten for bit line process

Joo Wan Lee, Jun Ki Kim, Soo Hyun Kim, Ho Jung Sun, Hong Seon Yang, Hyun Chul Sohn, Jin Woong Kim

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Physical and electrical characteristics of physical vapor-deposited tungsten for bit line process'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy