Physical modeling and characteristics of a Johnsen-Rahbek type electrostatic chuck

Jae Seok Choi, Jeonghoon Yoo, Sang Joon Hong, Tae Hyun Kim, Sung Jin Lee

Research output: Contribution to journalArticle

Abstract

Generally, a Johnsen-Rahbek (J-R) type electrostatic chuck (ESC) generates higher attractive force than a Coulomb type ESC. Attractive force in a J-R type ESC is caused by the high electrical resistance that occurs in the contact region between an object plate and a dielectric layer. This research tries the simple geometrical modeling of the contact surface and simulates the contact resistance, the attractive force and the response time according to the variation of contact surface shape. In the latter half of this research, the simulation for a pin-combined chuck is accomplished using a similar surface modeling and the comparison between the pin chuck and the general flat chuck is made in aspects of the attractive force and the response time.

Original languageEnglish
Pages (from-to)1221-1224
Number of pages4
JournalKey Engineering Materials
Volume326-328 II
Publication statusPublished - 2006 Dec 6

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Choi, J. S., Yoo, J., Hong, S. J., Kim, T. H., & Lee, S. J. (2006). Physical modeling and characteristics of a Johnsen-Rahbek type electrostatic chuck. Key Engineering Materials, 326-328 II, 1221-1224.