Piezoelectric properties of highly densified 0.01Pb (Mg1/2W 1/2)O3-0.41Pb (Ni1/3Nb2/3)O 3-0.35PbTiO3-0.23PbZrO3+0.1 wt% Y 2O3+1.5 wt% ZnO thick films on alumina substrate

Tae Hee Shin, Jong Yoon Ha, Hyun Cheol Song, Seok Jin Yoon, Hyung-Ho Park, Ji Won Choi

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Abstract

This paper reports on the formation of highly densified piezoelectric thick films of 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni 1/3Nb2/3)O3-0.35PbTiO3-0. 23PbZrO3+0.1 wt% Y2O3+1.5 wt% ZnO (PMW-PNN-PT-PZ+YZ) on alumina substrate by the screen-printing method. To increase the packing density of powder in screen-printing paste, attrition milled nano-scale powder was mixed with ball milled micro-scale powder, while the particle size distribution was properly controlled. Furthermore, the cold isostatic pressing process was used to improve the green density of the piezoelectric thick films. As a result of these processes, the PMW-PNN-PT-PZ+YZ thick film, sintered at 890 °C for 2 h, showed enhanced piezoelectric properties such as Pr=42 μC/cm2, Ec=25 kV/cm, and d33=100 pC/N, in comparison with other reports. Such prominent piezoelectric properties of PMW-PNN-PT-PZ+YZ thick films using bi-modal particle distribution and the CIP process can be applied to functional thick films in MEMS applications such as micro actuators and sensors.

Original languageEnglish
Pages (from-to)1327-1333
Number of pages7
JournalCeramics International
Volume39
Issue number2
DOIs
Publication statusPublished - 2013 Mar 1

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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