Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor

Jusang Park, Han Bo Ram Lee, Doyoung Kim, Jaehong Yoon, Clement Lansalot, Julien Gatineau, Henri Chevrel, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Plasma-enhanced atomic layer deposition of Co using Co(MeCp)<sub>2</sub> precursor'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds