Plasma-enhanced atomic layer deposition of tantalum thin films: The growth and film properties

H. Kim, S. M. Rossnagel

Research output: Contribution to journalArticle

26 Citations (Scopus)

Fingerprint Dive into the research topics of 'Plasma-enhanced atomic layer deposition of tantalum thin films: The growth and film properties'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy