Plastic deformation of microstructures using carbon nanotubes film as latching surface

Y. Eun, J. I. Lee, J. Choi, Y. Song, J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed method, arrays of angular vertical comb-drive (AVC) actuators were successfully fabricated by the silicon plastic deformation process while the CNTs anchored the strained microstructures. After the process, the CNTs were fully removable by thermal oxidation. The proposed method could be applied to diverse microelectro- mechanical systems (MEMS) for microscale assembly and harsh environment processing.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1626-1629
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

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All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Eun, Y., Lee, J. I., Choi, J., Song, Y., & Kim, J. (2011). Plastic deformation of microstructures using carbon nanotubes film as latching surface. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1626-1629). [5969807] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969807