Plastic deformation of microstructures using carbon nanotubes film as latching surface

Y. Eun, J. I. Lee, J. Choi, Y. Song, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed method, arrays of angular vertical comb-drive (AVC) actuators were successfully fabricated by the silicon plastic deformation process while the CNTs anchored the strained microstructures. After the process, the CNTs were fully removable by thermal oxidation. The proposed method could be applied to diverse microelectro- mechanical systems (MEMS) for microscale assembly and harsh environment processing.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1626-1629
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

Fingerprint

Carbon nanotubes
Plastic deformation
Microstructure
Silicon
Actuators
Oxidation
Temperature
Processing
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Eun, Y., Lee, J. I., Choi, J., Song, Y., & Kim, J. (2011). Plastic deformation of microstructures using carbon nanotubes film as latching surface. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1626-1629). [5969807] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969807
Eun, Y. ; Lee, J. I. ; Choi, J. ; Song, Y. ; Kim, Jongbaeg. / Plastic deformation of microstructures using carbon nanotubes film as latching surface. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 1626-1629 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).
@inproceedings{e9e033f83c29451992f7724f96edb80e,
title = "Plastic deformation of microstructures using carbon nanotubes film as latching surface",
abstract = "We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed method, arrays of angular vertical comb-drive (AVC) actuators were successfully fabricated by the silicon plastic deformation process while the CNTs anchored the strained microstructures. After the process, the CNTs were fully removable by thermal oxidation. The proposed method could be applied to diverse microelectro- mechanical systems (MEMS) for microscale assembly and harsh environment processing.",
author = "Y. Eun and Lee, {J. I.} and J. Choi and Y. Song and Jongbaeg Kim",
year = "2011",
month = "9",
day = "1",
doi = "10.1109/TRANSDUCERS.2011.5969807",
language = "English",
isbn = "9781457701573",
series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
pages = "1626--1629",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

}

Eun, Y, Lee, JI, Choi, J, Song, Y & Kim, J 2011, Plastic deformation of microstructures using carbon nanotubes film as latching surface. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969807, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1626-1629, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 11/6/5. https://doi.org/10.1109/TRANSDUCERS.2011.5969807

Plastic deformation of microstructures using carbon nanotubes film as latching surface. / Eun, Y.; Lee, J. I.; Choi, J.; Song, Y.; Kim, Jongbaeg.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1626-1629 5969807 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Plastic deformation of microstructures using carbon nanotubes film as latching surface

AU - Eun, Y.

AU - Lee, J. I.

AU - Choi, J.

AU - Song, Y.

AU - Kim, Jongbaeg

PY - 2011/9/1

Y1 - 2011/9/1

N2 - We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed method, arrays of angular vertical comb-drive (AVC) actuators were successfully fabricated by the silicon plastic deformation process while the CNTs anchored the strained microstructures. After the process, the CNTs were fully removable by thermal oxidation. The proposed method could be applied to diverse microelectro- mechanical systems (MEMS) for microscale assembly and harsh environment processing.

AB - We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed method, arrays of angular vertical comb-drive (AVC) actuators were successfully fabricated by the silicon plastic deformation process while the CNTs anchored the strained microstructures. After the process, the CNTs were fully removable by thermal oxidation. The proposed method could be applied to diverse microelectro- mechanical systems (MEMS) for microscale assembly and harsh environment processing.

UR - http://www.scopus.com/inward/record.url?scp=80052129479&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80052129479&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2011.5969807

DO - 10.1109/TRANSDUCERS.2011.5969807

M3 - Conference contribution

SN - 9781457701573

T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

SP - 1626

EP - 1629

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

ER -

Eun Y, Lee JI, Choi J, Song Y, Kim J. Plastic deformation of microstructures using carbon nanotubes film as latching surface. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1626-1629. 5969807. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969807