Plow and ridge nanofabrication

Wooyoung Shim, Keith A. Brown, Xiaozhu Zhou, Boris Rasin, Xing Liao, Abrin L. Schmucker, Chad A. Mirkin

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

Original languageEnglish
Pages (from-to)3058-3062
Number of pages5
JournalSmall
Volume9
Issue number18
DOIs
Publication statusPublished - 2013 Sep 23

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)

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  • Cite this

    Shim, W., Brown, K. A., Zhou, X., Rasin, B., Liao, X., Schmucker, A. L., & Mirkin, C. A. (2013). Plow and ridge nanofabrication. Small, 9(18), 3058-3062. https://doi.org/10.1002/smll.201203014