A polymer-based tactile sensor with flexibility and multi-directional sensing capability is presented. The proposed sensor consists of a polydimethylsiloxane (PDMS) bump, a polyimide (PI) substrate, Cr/Au electrode lines for electrical connection, NiCr piezoresistors, and an SU-8 support structure. The sensing mechanism is based on piezoresistive effect, in which the resistance of NiCr changes under mechanical load. The PMDS bump positioned at the center of the sensor transfers an applied force to the PI film, and the piezoresistors are differently deformed depending on the magnitude and direction of the force. A diaphragm structure formed by the SU-8 support with a trench allows the piezoresistor to be effectively deformed. Simulation and experimental results confirm that magnitude and direction can be obtained from an arbitrarily applied force by comparing the change in resistance of each sensing element. Based on its compatibility with conventional microfabrication, the proposed sensor may be a promising candidate for a low-cost tactile sensing solution for human‒machine interfaces.
|Number of pages||8|
|Journal||Micro and Nano Systems Letters|
|Publication status||Published - 2019 Dec|
Bibliographical noteFunding Information:
This work was supported by the National Research Foundation of Korea (NRF) Grant funded by the Korea government (MSIT) (2018R1A4A1025986).
© The Author(s) 2019.
All Science Journal Classification (ASJC) codes
- Biomedical Engineering