Post-processing techniques for locally self-assembled silicon nanowires

Ongi Englander, Dane Christensen, Jongbaeg Kim, Liwei Lin

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Post-processing techniques are applied after the integration and assembly of nanostructures and Microelectromechanical Systems (MEMS) to realize integrated Nanoelectromechanical Systems (NEMS). Experimentation is focused specifically on the application of post-processing steps to a locally self-assembled micro-to-nano system comprising of suspended silicon nanowires between two MEMS bridges. Local contact metallization, global metallization for rapid system functionalization and the application of aqueous treatment to the NEMS are among the post-processing techniques studied. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS and traditional MEMS processes. It is found that local and global contact metallization techniques effectively alleviate inherent problems at the nano-to-micro contact and the aqueous treatment study confirms the effectiveness of the super critical drying process for nanostructures.

Original languageEnglish
Pages (from-to)10-15
Number of pages6
JournalSensors and Actuators, A: Physical
Volume135
Issue number1
DOIs
Publication statusPublished - 2007 Mar 30

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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