Post-processing techniques for the integration of silicon nanowires and MEMS

Ongi Englander, Dane Christensen, Jongbaeg Kim, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Three post-processing techniques key for the integration of nanostructures and MEMS (Microelectromechanical Systems) are presented. The objective is to develop a toolset for integrated NEMS (Nanoelectromechanical Systems) design and processing. More specifically, experimentation is focused on (1) local contact metallization, (2) global metallization for rapid system functionalization and (3) aqueous treatment of self-assembled and suspended silicon nanowires between two MEMS bridges. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS. It is found that local contact metallization effectively alleviates inherent problems at the nano-to-micro contact, while the aqueous treatment confirms that nanoscale components of the system exhibit similar response as their microscale counterparts. Further, the global metallization process enables rapid functionalization as demonstrated in a hydrogen sensing experiment.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages930-933
Number of pages4
Volume2006
Publication statusPublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

Fingerprint

Silicon
Metallizing
Nanowires
microelectromechanical systems
MEMS
electric contacts
nanowires
NEMS
experimentation
silicon
Processing
systems engineering
microbalances
compatibility
hydrogen
Hydrogen
Nanostructures
Systems analysis
Experiments

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Englander, O., Christensen, D., Kim, J., & Lin, L. (2006). Post-processing techniques for the integration of silicon nanowires and MEMS. In 19th IEEE International Conference on Micro Electro Mechanical Systems (Vol. 2006, pp. 930-933). [1627953]
Englander, Ongi ; Christensen, Dane ; Kim, Jongbaeg ; Lin, Liwei. / Post-processing techniques for the integration of silicon nanowires and MEMS. 19th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2006 2006. pp. 930-933
@inproceedings{16426c0fcc2747e0ade3330095371183,
title = "Post-processing techniques for the integration of silicon nanowires and MEMS",
abstract = "Three post-processing techniques key for the integration of nanostructures and MEMS (Microelectromechanical Systems) are presented. The objective is to develop a toolset for integrated NEMS (Nanoelectromechanical Systems) design and processing. More specifically, experimentation is focused on (1) local contact metallization, (2) global metallization for rapid system functionalization and (3) aqueous treatment of self-assembled and suspended silicon nanowires between two MEMS bridges. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS. It is found that local contact metallization effectively alleviates inherent problems at the nano-to-micro contact, while the aqueous treatment confirms that nanoscale components of the system exhibit similar response as their microscale counterparts. Further, the global metallization process enables rapid functionalization as demonstrated in a hydrogen sensing experiment.",
author = "Ongi Englander and Dane Christensen and Jongbaeg Kim and Liwei Lin",
year = "2006",
month = "10",
day = "24",
language = "English",
isbn = "0780394755",
volume = "2006",
pages = "930--933",
booktitle = "19th IEEE International Conference on Micro Electro Mechanical Systems",

}

Englander, O, Christensen, D, Kim, J & Lin, L 2006, Post-processing techniques for the integration of silicon nanowires and MEMS. in 19th IEEE International Conference on Micro Electro Mechanical Systems. vol. 2006, 1627953, pp. 930-933, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06/1/22.

Post-processing techniques for the integration of silicon nanowires and MEMS. / Englander, Ongi; Christensen, Dane; Kim, Jongbaeg; Lin, Liwei.

19th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2006 2006. p. 930-933 1627953.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Post-processing techniques for the integration of silicon nanowires and MEMS

AU - Englander, Ongi

AU - Christensen, Dane

AU - Kim, Jongbaeg

AU - Lin, Liwei

PY - 2006/10/24

Y1 - 2006/10/24

N2 - Three post-processing techniques key for the integration of nanostructures and MEMS (Microelectromechanical Systems) are presented. The objective is to develop a toolset for integrated NEMS (Nanoelectromechanical Systems) design and processing. More specifically, experimentation is focused on (1) local contact metallization, (2) global metallization for rapid system functionalization and (3) aqueous treatment of self-assembled and suspended silicon nanowires between two MEMS bridges. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS. It is found that local contact metallization effectively alleviates inherent problems at the nano-to-micro contact, while the aqueous treatment confirms that nanoscale components of the system exhibit similar response as their microscale counterparts. Further, the global metallization process enables rapid functionalization as demonstrated in a hydrogen sensing experiment.

AB - Three post-processing techniques key for the integration of nanostructures and MEMS (Microelectromechanical Systems) are presented. The objective is to develop a toolset for integrated NEMS (Nanoelectromechanical Systems) design and processing. More specifically, experimentation is focused on (1) local contact metallization, (2) global metallization for rapid system functionalization and (3) aqueous treatment of self-assembled and suspended silicon nanowires between two MEMS bridges. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS. It is found that local contact metallization effectively alleviates inherent problems at the nano-to-micro contact, while the aqueous treatment confirms that nanoscale components of the system exhibit similar response as their microscale counterparts. Further, the global metallization process enables rapid functionalization as demonstrated in a hydrogen sensing experiment.

UR - http://www.scopus.com/inward/record.url?scp=33750107639&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33750107639&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0780394755

SN - 9780780394759

VL - 2006

SP - 930

EP - 933

BT - 19th IEEE International Conference on Micro Electro Mechanical Systems

ER -

Englander O, Christensen D, Kim J, Lin L. Post-processing techniques for the integration of silicon nanowires and MEMS. In 19th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2006. 2006. p. 930-933. 1627953