Post-processing techniques for the integration of silicon nanowires and MEMS

Ongi Englander, Dane Christensen, Jongbaeg Kim, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Three post-processing techniques key for the integration of nanostructures and MEMS (Microelectromechanical Systems) are presented. The objective is to develop a toolset for integrated NEMS (Nanoelectromechanical Systems) design and processing. More specifically, experimentation is focused on (1) local contact metallization, (2) global metallization for rapid system functionalization and (3) aqueous treatment of self-assembled and suspended silicon nanowires between two MEMS bridges. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS. It is found that local contact metallization effectively alleviates inherent problems at the nano-to-micro contact, while the aqueous treatment confirms that nanoscale components of the system exhibit similar response as their microscale counterparts. Further, the global metallization process enables rapid functionalization as demonstrated in a hydrogen sensing experiment.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages930-933
Number of pages4
Publication statusPublished - 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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