Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam

Kie Moon Song, Soon Joon Rho, Han Jin Ahn, Kyung Chan Kim, Hong Koo Baik, Jeoung Yeon Hwang, Yong Min Jo, Dae-Shik Seo, Se Jong Lee

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.

Original languageEnglish
Pages (from-to)1577-1580
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume43
Issue number4 A
DOIs
Publication statusPublished - 2004 Jan 1

Fingerprint

Carbon films
Amorphous carbon
Ion beams
ion beams
Irradiation
Thin films
irradiation
carbon
thin films
Liquid crystals
liquid crystals
alignment
energy
Optical band gaps
Plasma enhanced chemical vapor deposition
surface properties
Surface properties
transmittance
vapor deposition
Gases

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Song, Kie Moon ; Rho, Soon Joon ; Ahn, Han Jin ; Kim, Kyung Chan ; Baik, Hong Koo ; Hwang, Jeoung Yeon ; Jo, Yong Min ; Seo, Dae-Shik ; Lee, Se Jong. / Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2004 ; Vol. 43, No. 4 A. pp. 1577-1580.
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abstract = "Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.",
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Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam. / Song, Kie Moon; Rho, Soon Joon; Ahn, Han Jin; Kim, Kyung Chan; Baik, Hong Koo; Hwang, Jeoung Yeon; Jo, Yong Min; Seo, Dae-Shik; Lee, Se Jong.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 4 A, 01.01.2004, p. 1577-1580.

Research output: Contribution to journalArticle

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T1 - Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam

AU - Song, Kie Moon

AU - Rho, Soon Joon

AU - Ahn, Han Jin

AU - Kim, Kyung Chan

AU - Baik, Hong Koo

AU - Hwang, Jeoung Yeon

AU - Jo, Yong Min

AU - Seo, Dae-Shik

AU - Lee, Se Jong

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AB - Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.

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