Abstract
Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.
| Original language | English |
|---|---|
| Pages (from-to) | 1577-1580 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 43 |
| Issue number | 4 A |
| DOIs | |
| Publication status | Published - 2004 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)
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Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam. / Song, Kie Moon; Rho, Soon Joon; Ahn, Han Jin; Kim, Kyung Chan; Baik, Hong Koo; Hwang, Jeoung Yeon; Jo, Yong Min; Seo, Dae-Shik; Lee, Se Jong.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 4 A, 01.01.2004, p. 1577-1580.Research output: Contribution to journal › Article
TY - JOUR
T1 - Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam
AU - Song, Kie Moon
AU - Rho, Soon Joon
AU - Ahn, Han Jin
AU - Kim, Kyung Chan
AU - Baik, Hong Koo
AU - Hwang, Jeoung Yeon
AU - Jo, Yong Min
AU - Seo, Dae-Shik
AU - Lee, Se Jong
PY - 2004/1/1
Y1 - 2004/1/1
N2 - Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.
AB - Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.
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U2 - 10.1143/JJAP.43.1577
DO - 10.1143/JJAP.43.1577
M3 - Article
AN - SCOPUS:3042853066
VL - 43
SP - 1577
EP - 1580
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 4 A
ER -