Abstract
Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.
| Original language | English |
|---|---|
| Pages (from-to) | 1577-1580 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 43 |
| Issue number | 4 A |
| DOIs | |
| Publication status | Published - 2004 Apr |
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)
Fingerprint Dive into the research topics of 'Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam'. Together they form a unique fingerprint.
Cite this
Song, K. M., Rho, S. J., Ahn, H. J., Kim, K. C., Baik, H. K., Hwang, J. Y., Jo, Y. M., Seo, D. S., & Lee, S. J. (2004). Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 43(4 A), 1577-1580. https://doi.org/10.1143/JJAP.43.1577