Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam

Kie Moon Song; Soon Joon Rho; Han Jin Ahn; Kyung Chan Kim; Hong Koo Baik; Jeoung Yeon Hwang; Yong Min Jo; Dae Shik Seo; Se Jong Lee

doi:10.1143/JJAP.43.1577

Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam

Kie Moon Song, Soon Joon Rho, Han Jin Ahn, Kyung Chan Kim, Hong Koo Baik, Jeoung Yeon Hwang, Yong Min Jo, Dae Shik Seo, Se Jong Lee

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C ₂H₂ and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I _D/I_G ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp² structures on the surface of a-C:H thin films.

Original language	English
Pages (from-to)	1577-1580
Number of pages	4
Journal	Japanese Journal of Applied Physics
Volume	43
Issue number	4 A
DOIs	https://doi.org/10.1143/JJAP.43.1577
Publication status	Published - 2004 Apr

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.43.1577

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@article{31e7bf4ee0924a62bfcd67cc183b7ef5,

title = "Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam",

abstract = "Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.",

author = "Song, {Kie Moon} and Rho, {Soon Joon} and Ahn, {Han Jin} and Kim, {Kyung Chan} and Baik, {Hong Koo} and Hwang, {Jeoung Yeon} and Jo, {Yong Min} and Seo, {Dae Shik} and Lee, {Se Jong}",

year = "2004",

month = apr,

doi = "10.1143/JJAP.43.1577",

language = "English",

volume = "43",

pages = "1577--1580",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

number = "4 A",

}

Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam. / Song, Kie Moon; Rho, Soon Joon; Ahn, Han Jin; Kim, Kyung Chan; Baik, Hong Koo; Hwang, Jeoung Yeon; Jo, Yong Min; Seo, Dae Shik; Lee, Se Jong.

In: Japanese Journal of Applied Physics, Vol. 43, No. 4 A, 04.2004, p. 1577-1580.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam

AU - Song, Kie Moon

AU - Rho, Soon Joon

AU - Ahn, Han Jin

AU - Kim, Kyung Chan

AU - Baik, Hong Koo

AU - Hwang, Jeoung Yeon

AU - Jo, Yong Min

AU - Seo, Dae Shik

AU - Lee, Se Jong

PY - 2004/4

Y1 - 2004/4

N2 - Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.

AB - Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.

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DO - 10.1143/JJAP.43.1577

M3 - Article

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VL - 43

SP - 1577

EP - 1580

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

SN - 0021-4922

IS - 4 A

ER -

Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam

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