Postgrowth irradiation of hydrogenated amorphous carbon thin films by low-energy ion beam

Kie Moon Song, Soon Joon Rho, Han Jin Ahn, Kyung Chan Kim, Hong Koo Baik, Jeoung Yeon Hwang, Yong Min Jo, Dae Shik Seo, Se Jong Lee

Research output: Contribution to journalArticle

12 Citations (Scopus)


Liquid crystal (LC) alignment property was investigated on hydrogenated amorphous carbon (a-C:H) thin films. a-C:H thin films were deposited by a remote plasma-enhanced chemical vapor deposition (RPECVD) method with C 2H2 and He gases. The surface property of a-C:H thin films was controlled by low-energy Ar ion beams. Ion beam irradiation results in the decrease in optical band gap and transmittance, and the increase in the I D/IG ratio of a-C:H thin films. LC alignment was generated by ion beam irradiation on the surface of a-C:H thin films. LC alignment property was affected by ion-beam-induced anisotropic sp2 structures on the surface of a-C:H thin films.

Original languageEnglish
Pages (from-to)1577-1580
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number4 A
Publication statusPublished - 2004 Apr


All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this