Practical implementation of the complex wavefront modulation model for optical alignment

Hanshin Lee, Gavin B. Dalton, Ian A.J. Tosh, Sug Whan Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We discuss the implementation of the complex wavefront modulation model in practical optical alignment procedures and present its interim results. This modulation model describes the relation between the alignment state and the wavefront of a system, both are expressed in mathematical complex quantities. It addresses the importance of the coupled inter-element alignment effect to the resultant system wavefront. We utilise this effect in order to extract the alignment state of a system from measured optical wavefronts. We demonstrate the method's practical applicability to the real optical alignment procedure by showing alignment simulations of a centered three-mirror system.

Original languageEnglish
Title of host publicationModeling Aspects in Optical Metrology
DOIs
Publication statusPublished - 2007 Nov 26
EventModeling Aspects in Optical Metrology - Munich, Germany
Duration: 2007 Jun 182007 Jun 19

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6617
ISSN (Print)0277-786X

Other

OtherModeling Aspects in Optical Metrology
CountryGermany
CityMunich
Period07/6/1807/6/19

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Lee, H., Dalton, G. B., Tosh, I. A. J., & Kim, S. W. (2007). Practical implementation of the complex wavefront modulation model for optical alignment. In Modeling Aspects in Optical Metrology [66170N] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6617). https://doi.org/10.1117/12.726244