A method to characterize interference fringes is proposed by utilizing a Fresnel zone plate. Through the optical power measurement of the far-field irradiance produced by an image grating and a Fresnel zone plate, the interference fringe periods are obtained. This scheme can be used for a wide range of fringe periods, and may enable achievement of subnanometer fringe characterization with corrected error sources.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 2002 Nov|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering