Precision fringe metrology using a Fresnel zone plate

Chulmin Joo, G. S. Pati, Carl G. Chen, Paul T. Konkola, Ralf K. Heilmann, Mark L. Schattenburg, Alexander Liddle, Erik H. Anderson

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10 Citations (Scopus)

Abstract

A method to characterize interference fringes is proposed by utilizing a Fresnel zone plate. Through the optical power measurement of the far-field irradiance produced by an image grating and a Fresnel zone plate, the interference fringe periods are obtained. This scheme can be used for a wide range of fringe periods, and may enable achievement of subnanometer fringe characterization with corrected error sources.

Original languageEnglish
Pages (from-to)3075-3079
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number6
DOIs
Publication statusPublished - 2002 Nov 1

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Joo, C., Pati, G. S., Chen, C. G., Konkola, P. T., Heilmann, R. K., Schattenburg, M. L., Liddle, A., & Anderson, E. H. (2002). Precision fringe metrology using a Fresnel zone plate. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 20(6), 3075-3079. https://doi.org/10.1116/1.1523018