Precision fringe metrology using a Fresnel zone plate

Chulmin Joo, G. S. Pati, Carl G. Chen, Paul T. Konkola, Ralf K. Heilmann, Mark L. Schattenburg, Alexander Liddle, Erik H. Anderson

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

A method to characterize interference fringes is proposed by utilizing a Fresnel zone plate. Through the optical power measurement of the far-field irradiance produced by an image grating and a Fresnel zone plate, the interference fringe periods are obtained. This scheme can be used for a wide range of fringe periods, and may enable achievement of subnanometer fringe characterization with corrected error sources.

Original languageEnglish
Pages (from-to)3075-3079
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number6
DOIs
Publication statusPublished - 2002 Nov

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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