Precision stage using a non-contact planar actuator based on magnetic suspension technology

Kwang Suk Jung, Yoon Su Baek

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

The precision stage using a novel contact-free planar actuator based on magnetic forces, magnetized force and Lorentz force, is suggested. In the promising magnetic structure, a mover is levitated by magnetized force between iron-core electromagnets attached under the upper-side of a stator and ferromagnetic plates belonging to the mover. And the mover is driven by Lorentz force that acts on permanent magnets with an identical polarity put under magnetic field by air-core coils. Namely, the mover is driven directly without any transmission mechanism, and does not need any auxiliary driver for its posture calibration. Then it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness, or general-purpose nano-stage. In this paper, we discuss a driving principle of the planar system including the magnetic force generation mechanism, a framework for the force model, governing characteristics of the levitated plate, and a planar motion control of the constructed prototype. And experimental results are given to verify the derived theoretical model and the feasibility of the system.

Original languageEnglish
Pages (from-to)981-999
Number of pages19
JournalMechatronics
Volume13
Issue number8-9 SPEC.
DOIs
Publication statusPublished - 2003 Oct 1

Fingerprint

Lorentz force
Actuators
Electromagnets
Magnetic structure
Motion control
Stators
Permanent magnets
Calibration
Magnetic fields
Iron
Air

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

@article{a9f322ada16a4ee794848f53fda89059,
title = "Precision stage using a non-contact planar actuator based on magnetic suspension technology",
abstract = "The precision stage using a novel contact-free planar actuator based on magnetic forces, magnetized force and Lorentz force, is suggested. In the promising magnetic structure, a mover is levitated by magnetized force between iron-core electromagnets attached under the upper-side of a stator and ferromagnetic plates belonging to the mover. And the mover is driven by Lorentz force that acts on permanent magnets with an identical polarity put under magnetic field by air-core coils. Namely, the mover is driven directly without any transmission mechanism, and does not need any auxiliary driver for its posture calibration. Then it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness, or general-purpose nano-stage. In this paper, we discuss a driving principle of the planar system including the magnetic force generation mechanism, a framework for the force model, governing characteristics of the levitated plate, and a planar motion control of the constructed prototype. And experimental results are given to verify the derived theoretical model and the feasibility of the system.",
author = "Jung, {Kwang Suk} and Baek, {Yoon Su}",
year = "2003",
month = "10",
day = "1",
doi = "10.1016/S0957-4158(03)00011-4",
language = "English",
volume = "13",
pages = "981--999",
journal = "Mechatronics",
issn = "0957-4158",
publisher = "Elsevier Limited",
number = "8-9 SPEC.",

}

Precision stage using a non-contact planar actuator based on magnetic suspension technology. / Jung, Kwang Suk; Baek, Yoon Su.

In: Mechatronics, Vol. 13, No. 8-9 SPEC., 01.10.2003, p. 981-999.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Precision stage using a non-contact planar actuator based on magnetic suspension technology

AU - Jung, Kwang Suk

AU - Baek, Yoon Su

PY - 2003/10/1

Y1 - 2003/10/1

N2 - The precision stage using a novel contact-free planar actuator based on magnetic forces, magnetized force and Lorentz force, is suggested. In the promising magnetic structure, a mover is levitated by magnetized force between iron-core electromagnets attached under the upper-side of a stator and ferromagnetic plates belonging to the mover. And the mover is driven by Lorentz force that acts on permanent magnets with an identical polarity put under magnetic field by air-core coils. Namely, the mover is driven directly without any transmission mechanism, and does not need any auxiliary driver for its posture calibration. Then it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness, or general-purpose nano-stage. In this paper, we discuss a driving principle of the planar system including the magnetic force generation mechanism, a framework for the force model, governing characteristics of the levitated plate, and a planar motion control of the constructed prototype. And experimental results are given to verify the derived theoretical model and the feasibility of the system.

AB - The precision stage using a novel contact-free planar actuator based on magnetic forces, magnetized force and Lorentz force, is suggested. In the promising magnetic structure, a mover is levitated by magnetized force between iron-core electromagnets attached under the upper-side of a stator and ferromagnetic plates belonging to the mover. And the mover is driven by Lorentz force that acts on permanent magnets with an identical polarity put under magnetic field by air-core coils. Namely, the mover is driven directly without any transmission mechanism, and does not need any auxiliary driver for its posture calibration. Then it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness, or general-purpose nano-stage. In this paper, we discuss a driving principle of the planar system including the magnetic force generation mechanism, a framework for the force model, governing characteristics of the levitated plate, and a planar motion control of the constructed prototype. And experimental results are given to verify the derived theoretical model and the feasibility of the system.

UR - http://www.scopus.com/inward/record.url?scp=0037672428&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037672428&partnerID=8YFLogxK

U2 - 10.1016/S0957-4158(03)00011-4

DO - 10.1016/S0957-4158(03)00011-4

M3 - Article

AN - SCOPUS:0037672428

VL - 13

SP - 981

EP - 999

JO - Mechatronics

JF - Mechatronics

SN - 0957-4158

IS - 8-9 SPEC.

ER -