Preparation and characterization of low k thin film using a preceramic polymer

Jung Ju Kim, Jung Hyun Lee, Yoon Joo Lee, Woo Teck Kwon, Soo Ryong Kim, Doo Jin Choi, Hyungsun Kim, Younghee Kim

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Recently, variety of organic and inorganic hybrid materials have recently investigated as alternative routes to SiOC, SiO2 thin film formation at low temperatures for applications in electronic ceramics. Specially, silicon based polymers, such as polycarbosilane, polysilane and polysilazane derivatives have been studied for use in electronic ceramics and have been applied as dielectric or insulating materials. In this study, Polycarbosilane(PCS), which Si-CH2-Si bonds build up the backbone of the polymer, has been investigated as low-k materials using a solution process. After heat treatment at 350°C under N2 atmosphere, chemical composition and dielectric constant of the thin film were SiO0.27C1.94 and 1.2, respectively. Mechanical property measured using nanoindentor shows 1.37 GPa.

Original languageEnglish
Pages (from-to)499-503
Number of pages5
JournalJournal of the Korean Ceramic Society
Volume48
Issue number6
DOIs
Publication statusPublished - 2011 Nov

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites

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