Preparation of 0.5 μm thick self-patternable PZT films by sol-gel procedure for applying to the micro-detection system

Jae Seob Hwang, Woo Sik Kim, Hyung Ho Park, Tae Song Kim

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


Lead zirconate titanate (PbZrxTi1-xO3; PZT) (x=0.52) films using photosensitive PZT solution were formed on platinum(111)-coated Si substrate by sol-gel method. A relative thick self-patternable PZT film using photosensitive stock solution with 15% of excess Pb and UV (365 nm) irradiation has reached an advanced state in the application area of micro-detection system. Well-developed physical and electrical properties were observed after final anneal treatment due to the adaptation of optimized intermediate anneal treatment to remove organic groups in the film without the formation of pyrochlore phase. The 510 nm thick PZT film with smooth surface showed remnant polarization (Pr) of 25 μC/cm2, coercive field (Ec) of 45 kV/cm, and piezoelectric coefficient of d33 = 183 pC/N. The film showed a little leaky behavior when comparing with conventional PZT films prepared by sol-gel procedure and it was due to the incomplete removal of organic bonds through the intermediate anneal treatment. From the consideration of thickness, microstructure, and ferroelectric/piezoelectric properties of this self-patternable PZT film, it could be applicable to the micro-detecting system.

Original languageEnglish
Pages (from-to)73-77
Number of pages5
JournalMicroelectronic Engineering
Issue number1
Publication statusPublished - 2003 Oct

Bibliographical note

Funding Information:
This research, under the contract project code MS-02-133-01, has been supported by the Intelligent Microsystem Center (IMC: ), which carries out one of the 21st century’s Frontier R&D Projects sponsored by the Korea Ministry of Science and Technology.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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