Preparation of 0.5 μm thick self-patternable PZT films by sol-gel procedure for applying to the micro-detection system

Jae Seob Hwang, Woo Sik Kim, Hyung Ho Park, Tae Song Kim

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Preparation of 0.5 μm thick self-patternable PZT films by sol-gel procedure for applying to the micro-detection system'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds