Preparation of diffuser type micropump using screen-printed PZT-PCW thick films

Yong Bum Kim, Hyung Joon Kim, Chae Il Cheon, Doo Jin Choi, Tae Song Kim

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

This paper describes the preparation and experimental results of the piezoelectric actuating diaphragm and the diffuser type micropump using screen printing thick-film technologies and Si micro-machining. The micropump has a pumping chamber with an oscillating diaphragm which compresses the pumping chamber. Inlet and outlet planar diffusers direct the liquid flow. The micropump is a stack of two layers bonded together: one silicon piece with Si diaphragm actuator using PZT-PCW thick films, other piece having pumping chamber, planar diffuser and fluidic access holes. Si diaphragm of about 15-25 μm thickness are prepared on Si(100) wafers by TMAH wet etching. The PZT-PCW thick films are prepared by hybrid method of screen printing modified with PZT sol-gel application. The results from this study show that it is good to perform combination of screen printed PZT thick-film onto micromachined Si structure.

Original languageEnglish
Pages (from-to)61-70
Number of pages10
JournalIntegrated Ferroelectrics
Volume50
DOIs
Publication statusPublished - 2002 Jan 1

Fingerprint

diffusers
diaphragms
Diaphragms
Thick films
thick films
preparation
pumping
Screen printing
chambers
printing
Wet etching
liquid flow
fluidics
Fluidics
Silicon
outlets
machining
Sol-gels
Machining
Actuators

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Kim, Yong Bum ; Kim, Hyung Joon ; Cheon, Chae Il ; Choi, Doo Jin ; Kim, Tae Song. / Preparation of diffuser type micropump using screen-printed PZT-PCW thick films. In: Integrated Ferroelectrics. 2002 ; Vol. 50. pp. 61-70.
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Preparation of diffuser type micropump using screen-printed PZT-PCW thick films. / Kim, Yong Bum; Kim, Hyung Joon; Cheon, Chae Il; Choi, Doo Jin; Kim, Tae Song.

In: Integrated Ferroelectrics, Vol. 50, 01.01.2002, p. 61-70.

Research output: Contribution to journalArticle

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AB - This paper describes the preparation and experimental results of the piezoelectric actuating diaphragm and the diffuser type micropump using screen printing thick-film technologies and Si micro-machining. The micropump has a pumping chamber with an oscillating diaphragm which compresses the pumping chamber. Inlet and outlet planar diffusers direct the liquid flow. The micropump is a stack of two layers bonded together: one silicon piece with Si diaphragm actuator using PZT-PCW thick films, other piece having pumping chamber, planar diffuser and fluidic access holes. Si diaphragm of about 15-25 μm thickness are prepared on Si(100) wafers by TMAH wet etching. The PZT-PCW thick films are prepared by hybrid method of screen printing modified with PZT sol-gel application. The results from this study show that it is good to perform combination of screen printed PZT thick-film onto micromachined Si structure.

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