Pressure-assisted capillary force lithography was introduced using a permeable fluoropolymer material as a mold. Slight pressing when combined with a newly developed experimental set-up ensured conformal contact between the stiff fluoropolymer mold and the substrate. The stiff nature of the mold material made it possible to pattern sub-100 nm features.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering