Pressure-assisted capillary force lithography

Dahl-Young Khang, Hong H. Lee

Research output: Contribution to journalArticle

49 Citations (Scopus)

Abstract

Pressure-assisted capillary force lithography was introduced using a permeable fluoropolymer material as a mold. Slight pressing when combined with a newly developed experimental set-up ensured conformal contact between the stiff fluoropolymer mold and the substrate. The stiff nature of the mold material made it possible to pattern sub-100 nm features.

Original languageEnglish
Pages (from-to)176-179
Number of pages4
JournalAdvanced Materials
Volume16
Issue number2
DOIs
Publication statusPublished - 2004 Jan 16

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Fluorine containing polymers
Lithography
Substrates

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Khang, Dahl-Young ; Lee, Hong H. / Pressure-assisted capillary force lithography. In: Advanced Materials. 2004 ; Vol. 16, No. 2. pp. 176-179.
@article{530bd5738b234a74b46778601d6e0df9,
title = "Pressure-assisted capillary force lithography",
abstract = "Pressure-assisted capillary force lithography was introduced using a permeable fluoropolymer material as a mold. Slight pressing when combined with a newly developed experimental set-up ensured conformal contact between the stiff fluoropolymer mold and the substrate. The stiff nature of the mold material made it possible to pattern sub-100 nm features.",
author = "Dahl-Young Khang and Lee, {Hong H.}",
year = "2004",
month = "1",
day = "16",
doi = "10.1002/adma.200305673",
language = "English",
volume = "16",
pages = "176--179",
journal = "Advanced Materials",
issn = "0935-9648",
publisher = "Wiley-VCH Verlag",
number = "2",

}

Pressure-assisted capillary force lithography. / Khang, Dahl-Young; Lee, Hong H.

In: Advanced Materials, Vol. 16, No. 2, 16.01.2004, p. 176-179.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Pressure-assisted capillary force lithography

AU - Khang, Dahl-Young

AU - Lee, Hong H.

PY - 2004/1/16

Y1 - 2004/1/16

N2 - Pressure-assisted capillary force lithography was introduced using a permeable fluoropolymer material as a mold. Slight pressing when combined with a newly developed experimental set-up ensured conformal contact between the stiff fluoropolymer mold and the substrate. The stiff nature of the mold material made it possible to pattern sub-100 nm features.

AB - Pressure-assisted capillary force lithography was introduced using a permeable fluoropolymer material as a mold. Slight pressing when combined with a newly developed experimental set-up ensured conformal contact between the stiff fluoropolymer mold and the substrate. The stiff nature of the mold material made it possible to pattern sub-100 nm features.

UR - http://www.scopus.com/inward/record.url?scp=1142268969&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1142268969&partnerID=8YFLogxK

U2 - 10.1002/adma.200305673

DO - 10.1002/adma.200305673

M3 - Article

VL - 16

SP - 176

EP - 179

JO - Advanced Materials

JF - Advanced Materials

SN - 0935-9648

IS - 2

ER -