Pressure-assisted capillary force lithography

Dahl Young Khang, Hong H. Lee

Research output: Contribution to journalArticle

49 Citations (Scopus)

Abstract

Pressure-assisted capillary force lithography was introduced using a permeable fluoropolymer material as a mold. Slight pressing when combined with a newly developed experimental set-up ensured conformal contact between the stiff fluoropolymer mold and the substrate. The stiff nature of the mold material made it possible to pattern sub-100 nm features.

Original languageEnglish
Pages (from-to)176-179
Number of pages4
JournalAdvanced Materials
Volume16
Issue number2
DOIs
Publication statusPublished - 2004 Jan 16

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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