Pretreatment of GaAs (001) for sulfur passivation with (NH4)2Sx

Min Gu Kang, Hyung Ho Park, Kyung Soo Suh, Jong Lam Lee

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Surface properties of GaAs (001) cleaned with H3PO4 or HCl solutions and passivated with (NH4)2Sx solution were analyzed using X-ray photoelectron spectroscopy. All of the treatments were carried out in a glove box under a nitrogen-controlled atmosphere. Every cleaning process produced elemental As with a 42.0 eV photoelectron binding energy. The generated elemental As increased with the etching capability of acid to GaAs and the cycling order of applying acid to GaAs. Successive sulfidation treatment resulted in the formation of an As-S bond with a 42.8 eV photoelectron binding energy. And the observed quantity of As-S bond was closely related to the elemental As concentration. Photoluminescent experiments showed that improvement of surface properties in sulfidation treated GaAs (001) mainly depends on the number of sulfur bonds.

Original languageEnglish
Pages (from-to)328-333
Number of pages6
JournalThin Solid Films
Volume290-291
DOIs
Publication statusPublished - 1996 Dec 15

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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