Process estimation and optimized recipes of ZnO:Ga thin film characteristics for transparent electrode applications

Chang Eun Kim, Pyung Moon, Ilgu Yun, Sungyeon Kim, Jae Min Myoung, Hyeon Woo Jang, Jungsik Bang

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Ga-doped zinc oxide (ZnO:Ga) thin films were prepared on glass substrate by magnetron sputtering at room temperature (RT) and thermally annealed in hydrogen atmosphere for 1 h. The effects of film thickness and annealing temperature on sheet resistance, transmittance and figure of merit of ZnO:Ga thin films were analyzed and modeled using the artificial neural networks (NNets). The NNet models presented the good prediction on sheet resistance, transmittance and figure of merit of ZnO:Ga thin films and it was found that the electrical and optical properties of ZnO:Ga thin films were enhanced by thermal annealing. After NNet models were verified, genetic algorithm (GA) was used to search the optimized recipe for the desired figure of merit of ZnO:Ga thin films. The methodology allows us to estimate the optimal process condition with a small number of experiments.

Original languageEnglish
Pages (from-to)2823-2827
Number of pages5
JournalExpert Systems with Applications
Volume38
Issue number3
DOIs
Publication statusPublished - 2011 Mar 1

Fingerprint

Thin films
Electrodes
Sheet resistance
Annealing
Zinc oxide
Magnetron sputtering
Film thickness
Electric properties
Optical properties
Genetic algorithms
Neural networks
Glass
Hydrogen
Temperature
Substrates
Experiments

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Computer Science Applications
  • Artificial Intelligence

Cite this

Kim, Chang Eun ; Moon, Pyung ; Yun, Ilgu ; Kim, Sungyeon ; Myoung, Jae Min ; Jang, Hyeon Woo ; Bang, Jungsik. / Process estimation and optimized recipes of ZnO:Ga thin film characteristics for transparent electrode applications. In: Expert Systems with Applications. 2011 ; Vol. 38, No. 3. pp. 2823-2827.
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Process estimation and optimized recipes of ZnO:Ga thin film characteristics for transparent electrode applications. / Kim, Chang Eun; Moon, Pyung; Yun, Ilgu; Kim, Sungyeon; Myoung, Jae Min; Jang, Hyeon Woo; Bang, Jungsik.

In: Expert Systems with Applications, Vol. 38, No. 3, 01.03.2011, p. 2823-2827.

Research output: Contribution to journalArticle

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