Process mechanism for vacuum-assisted microfluidic lithography with ceramic colloidal suspensions

Sung Jin Ahn, Ji Hyun Min, Joosun Kim, Joo Ho Moon

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The infiltration kinetics and the drying mechanism of suspensions involved in vacuum-assisted microfluidic lithography (μFL) have been investigated for the fabrication of complex micropatterned ceramic structures. Infiltration lengths of alumina suspensions with various solid loadings into microchannels were analyzed as a function of channel widths ranging from 10 to 100 lm. The use of well-dispersed ethanol-based suspensions with lower viscosities and wider channels allowed for easier and longer infiltration due to lower fluidic resistance in the channels. In contrast to the micromolding in capillaries (MIMIC) method, vacuum-assisted μFL has a distinct drying mechanism in which there is a critical level of solid loading of the suspension with respect to the volume of the microchannel for the fabrication of a defect-free pattern structure.

Original languageEnglish
Pages (from-to)2143-2149
Number of pages7
JournalJournal of the American Ceramic Society
Volume91
Issue number7
DOIs
Publication statusPublished - 2008 Jul 1

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Infiltration
Microfluidics
ceramics
Lithography
Suspensions
infiltration
Vacuum
Microchannels
Drying
Fabrication
Fluidics
aluminum oxide
defect
Aluminum Oxide
ethanol
Ethanol
Alumina
viscosity
Viscosity
kinetics

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

Cite this

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Process mechanism for vacuum-assisted microfluidic lithography with ceramic colloidal suspensions. / Ahn, Sung Jin; Min, Ji Hyun; Kim, Joosun; Moon, Joo Ho.

In: Journal of the American Ceramic Society, Vol. 91, No. 7, 01.07.2008, p. 2143-2149.

Research output: Contribution to journalArticle

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