Process to form V-grooved trenches on patterned Si (001) substrates using in situ selective area etching in a MOCVD reactor

Young Dae Cho, In Geun Lee, Joo Hee Lee, Sun Wook Kim, Chan Soo Shin, Won Kyu Park, Chung Yi Kim, Dae Hyun Kim, Dae Hong Ko

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2 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds